Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11194659 | Method for executing a quantum error correction cycle in a quantum computer | Leonardo DiCarlo, Stefano Poletto | 2021-12-07 |
| 9176398 | Method and system for thermally conditioning an optical element | Roger W. Schmitz, Tjarko Adriaan Rudolf Van Empel, Marcel Johannus Elisabeth Hubertus Muitjens, Lun Kai Cheng, Franciscus Johannes Joseph Janssen +9 more | 2015-11-03 |
| 8585224 | Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination | Dirk Heinrich Ehm, Stephan Muellender, Thomas Stein, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn +2 more | 2013-11-19 |
| 8382301 | Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination | Dirk Heinrich Ehm, Stephan Muellender, Thomas Stein, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn +2 more | 2013-02-26 |
| 7963144 | Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing system | Norbertus Benedictus Koster, Bart Dinand Paarhuis | 2011-06-21 |
| 7624617 | Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing system | Norbertus Benedictus Koster, Bart Dinand Paarhuis | 2009-12-01 |