Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8980009 | Method for removing a contamination layer from an optical surface and arrangement therefor | Dirk Heinrich Ehm, Arnold Storm, Johannes Hubertus Josephina Moors, Thomas Stein, Edwin Te Sligte | 2015-03-17 |
| 8928855 | Lithographic apparatus comprising an internal sensor and a mini-reactor, and method for treating a sensing surface of the internal sensor | Johannes Hubertus Josephina Moors, Dirk Heinrich Ehm | 2015-01-06 |
| 8585224 | Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination | Dirk Heinrich Ehm, Stephan Muellender, Thomas Stein, Johannes Hubertus Josephina Moors, Dieter Kraus +2 more | 2013-11-19 |
| 8553200 | Optical element with at least one electrically conductive region, and illumination system with the optical element | Dirk Heinrich Ehm, Berndt Warm | 2013-10-08 |
| 8419862 | Method for removing a contamination layer from an optical surface and arrangement therefor as well as a method for generating a cleaning gas and arrangement therefor | Dirk Heinrich Ehm, Arnold Storm, Johannes Josephina Moors, Thomas Stein, Edwin te Sligte | 2013-04-16 |
| 8382301 | Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination | Dirk Heinrich Ehm, Stephan Muellender, Thomas Stein, Johannes Hubertus Josephina Moors, Dieter Kraus +2 more | 2013-02-26 |
| 8279397 | Method for removing contamination on optical surfaces and optical arrangement | Dirk Heinrich Ehm, Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Vladimir Vitalevitsch Ivanov | 2012-10-02 |
| 7959310 | Optical arrangement and EUV lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical element | Dirk Heinrich Ehm, Annemieke Van De Runstraat, Arnoldus Jan Storm, Thomas Stein, Marco G. H. Meijerink +8 more | 2011-06-14 |
| 7935218 | Optical apparatus, lithographic apparatus and device manufacturing method | Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Carolus Ida Maria Antonius Spee, Rik Jansen | 2011-05-03 |
| 7928412 | Lithographic apparatus, and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Peterus Henricus De Kuster, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens +5 more | 2011-04-19 |
| 7812330 | Radical cleaning arrangement for a lithographic apparatus | Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Johannes Hubertus Josephina Moors, Derk Jan Wilfred Klunder, Maarten Marinus Johannes Wilhelmus Van Herpen | 2010-10-12 |
| 7763870 | Optical system for radiation in the EUV-wavelength range and method for measuring a contamination status of EUV-reflective elements | Dirk Heinrich Ehm, Hermann Bieg, Hans-Juergen Mann, Stephan Muellender, Johannes Hubertus Josephina Moors | 2010-07-27 |
| 7684012 | Lithographic device, device manufacturing method and device manufactured thereby | Johannes Henricus Wilhelmus Jacobs, Vadim Yevgenyevich Banine, Barrie Dudley Brewster, Vladimir Vitalevitch Ivanov, Bastiaan Mertens +2 more | 2010-03-23 |
| 7671347 | Cleaning method, apparatus and cleaning system | Dirk Heinrich Ehm, Johannes Hubertus Josephina Moors, Marcus Gerhardus Hendrikus Meijerink, Thomas Stein | 2010-03-02 |
| 7629594 | Lithographic apparatus, and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Peterus Henricus De Kuster, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens +5 more | 2009-12-08 |
| 7491951 | Lithographic apparatus, system and device manufacturing method | Marc Hubertus Lorenz Van Der Velden, Vadim Yevgenyevich Banine, Bastiaan Mertens, Johannes Hubertus Josephina Moors, Markus Weiss +1 more | 2009-02-17 |
| 7462850 | Radical cleaning arrangement for a lithographic apparatus | Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Johannes Hubertus Josephina Moors, Derk Jan Wilfred Klunder, Maarten Marinus Johannes Wilhelmus Van Herpen | 2008-12-09 |
| 7405417 | Lithographic apparatus having a monitoring device for detecting contamination | Lucas Henricus Johannes Stevens, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors | 2008-07-29 |
| 7279690 | Lithographic apparatus and device manufacturing method | Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Bastiaan Mertens +4 more | 2007-10-09 |