Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10365558 | Apparatus and method for manufacturing a pellicle, and a pellicle | Maarten Mathijs Marinus Jansen, Juan Espinoza | 2019-07-30 |
| 7928412 | Lithographic apparatus, and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens, Bastiaan Theodoor Wolschrijn +5 more | 2011-04-19 |
| 7629594 | Lithographic apparatus, and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens, Bastiaan Theodoor Wolschrijn +5 more | 2009-12-08 |
| 7167232 | Lithographic apparatus and radiation source comprising a debris-mitigation system and method for mitigating debris particles in a lithographic apparatus | Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Frank Jeroen Pieter Schuurmans, Lucas Henricus Johannes Stevens | 2007-01-23 |