| 12242204 |
Substrate support, lithographic apparatus, method for manipulating charge distribution and method for preparing a substrate |
Ruud Antonius Catharina Maria Beerens, Koen Gerhardus Winkels, Dirk Willem Harberts, Dennis Dominic VAN DER VOORT, Edwin Johannes Cornelis Bos +2 more |
2025-03-04 |
| 11269259 |
Lithographic apparatus and a device manufacturing method |
Thomas POIESZ, Bert Dirk SCHOLTEN, Dirk Willem Harberts, Laura Maria Fernandez Diaz, Johannes Adrianus Cornelis Maria Pijnenburg +3 more |
2022-03-08 |
| 11086238 |
System, a lithographic apparatus, and a method for reducing oxidation or removing oxide on a substrate support |
Nina Vladimirovna Dziomkina, Laura Maria Fernandez Diaz, Johannes Adrianus Cornelis Maria Pijnenburg |
2021-08-10 |
| 10871715 |
Lithographic apparatus and a device manufacturing method |
Thomas POIESZ, Bert Dirk SCHOLTEN, Dirk Willem Harberts, Laura Maria Fernandez Diaz, Johannes Adrianus Cornelis Maria Pijnenburg +3 more |
2020-12-22 |
| 10481510 |
Graphene spectral purity filter |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Maarten Van Kampen |
2019-11-19 |
| 9989844 |
Pellicle for reticle and multilayer mirror |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Maarten Van Kampen |
2018-06-05 |
| 9645502 |
Lithographic apparatus, programmable patterning device and lithographic method |
Pieter Willem Herman De Jager, Vadim Yevgenyevich Banine, Johannes Onvlee, Sander Frederik Wuister, Nikolay Nikolaevich Iosad |
2017-05-09 |
| 9482960 |
Pellicle for reticle and multilayer mirror |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Maarten Van Kampen |
2016-11-01 |
| 9395630 |
Lithographic apparatus and method |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Maarten Van Kampen |
2016-07-19 |
| 9304077 |
Inspection apparatus and method |
Arno Jan Bleeker |
2016-04-05 |
| 8547551 |
Lithographic apparatus and contamination detection method |
Anastasius Jacobus Anicetus Bruinsma, Johannes Hubertus Josephina Moors, Abraham Veefkind, Peter Gerhardus Wilhelmus Bussink, Egbert Anne Martijn Brouwer |
2013-10-01 |
| 8445873 |
System and method for detecting at least one contamination species in a lithographic apparatus |
Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Ralph Kurt, Johannes Hubertus Josephina Moors, Peter Cornelis Zalm |
2013-05-21 |
| 8217347 |
System and method for detecting at least one contamination species in a lithographic apparatus |
Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Ralph Kurt, Johannes Hubertus Josephina Moors, Peter Cornelis Zalm |
2012-07-10 |
| 8149379 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Ronald Van Der Ham, Michel Riepen |
2012-04-03 |
| 7928412 |
Lithographic apparatus, and device manufacturing method |
Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Peterus Henricus De Kuster, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn +5 more |
2011-04-19 |
| 7897110 |
System and method for detecting at least one contamination species in a lithographic apparatus |
Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Ralph Kurt, Johannes Hubertus Josephina Moors, Peter Cornelis Zalm |
2011-03-01 |
| 7800079 |
Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing method |
Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Johannes Hubertus Josephina Moors, Yurii Victorvitch Sidelnikov, Marcel Mathijs Theodore Marie Dierichs +1 more |
2010-09-21 |
| 7629594 |
Lithographic apparatus, and device manufacturing method |
Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Peterus Henricus De Kuster, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn +5 more |
2009-12-08 |
| 7528395 |
Radiation source, lithographic apparatus and device manufacturing method |
Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine, Vladimir Vital'evitch Ivanov, Erik René Kieft, Erik Roelof Loopstra +5 more |
2009-05-05 |
| 7405417 |
Lithographic apparatus having a monitoring device for detecting contamination |
Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn |
2008-07-29 |
| 7167232 |
Lithographic apparatus and radiation source comprising a debris-mitigation system and method for mitigating debris particles in a lithographic apparatus |
Vadim Yevgenyevich Banine, Johannes Peterus Henricus De Kuster, Johannes Hubertus Josephina Moors, Frank Jeroen Pieter Schuurmans |
2007-01-23 |
| 7095479 |
Lithographic apparatus, device manufacturing method and device manufactured thereby |
Martinus Hendrikus Antonius Leenders, Hans Meiling, Johannes Hubertus Josephina Moors |
2006-08-22 |