| 12235592 |
Object holder, electrostatic sheet and method for making an electrostatic sheet |
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Koos Van Berkel, Marcus Adrianus Van De Kerkhof, Roger Franciscus Mattheus Maria Hamelinck, Shahab Shervin +7 more |
2025-02-25 |
| 12197139 |
Object holder, tool and method of manufacturing an object holder |
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Johannes Bernardus Charles ENGELEN, Arnoud Willem Notenboom, Jim Vincent Overkamp, Kjeld Gertrudus Hendrikus Janssen +3 more |
2025-01-14 |
| 11287752 |
Cooling apparatus and plasma-cleaning station for cooling apparatus |
Adrianus Hendrik Koevoets, Cornelis Adrianus De Meijere, Willem Michiel De Rapper, Sjoerd Nicolaas Lambertus Donders, Jan Groenewold +4 more |
2022-03-29 |
| 11269259 |
Lithographic apparatus and a device manufacturing method |
Thomas POIESZ, Bert Dirk SCHOLTEN, Dirk Willem Harberts, Lucas Henricus Johannes Stevens, Laura Maria Fernandez Diaz +3 more |
2022-03-08 |
| 11156924 |
Substrate support, lithographic apparatus, substrate inspection apparatus, device manufacturing method |
Johannes Petrus Martinus Bernardus Vermeulen, Luc Leonardus Adrianus Martinus Meulendijks, Antonius Franciscus Johannes De Groot |
2021-10-26 |
| 11086238 |
System, a lithographic apparatus, and a method for reducing oxidation or removing oxide on a substrate support |
Lucas Henricus Johannes Stevens, Nina Vladimirovna Dziomkina, Laura Maria Fernandez Diaz |
2021-08-10 |
| 10871715 |
Lithographic apparatus and a device manufacturing method |
Thomas POIESZ, Bert Dirk SCHOLTEN, Dirk Willem Harberts, Lucas Henricus Johannes Stevens, Laura Maria Fernandez Diaz +3 more |
2020-12-22 |