| 12197139 |
Object holder, tool and method of manufacturing an object holder |
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Johannes Bernardus Charles ENGELEN, Jim Vincent Overkamp, Kjeld Gertrudus Hendrikus Janssen, Johannes Adrianus Cornelis Maria Pijnenburg +3 more |
2025-01-14 |
| 12117726 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Chaitanya Krishna ANDE, Antonius Franciscus Johannes De Groot, Adrianus Johannes Maria Giesbers, Johannes Joseph Janssen +18 more |
2024-10-15 |
| 12072620 |
Method of manufacturing a membrane assembly |
Pieter-Jan Van Zwol, Sander Baltussen, Dennis De Graaf, Johannes Christiaan Leonardus Franken, Adrianus Johannes Maria Giesbers +11 more |
2024-08-27 |
| 12066758 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil +9 more |
2024-08-20 |
| 11971654 |
Metal-silicide-nitridation for stress reduction |
Pieter-Jan Van Zwol, Adrianus Johannes Maria Giesbers, Johan Hendrik Klootwijk, Evgenia KURGANOVA, Maxim Aleksandrovich Nasalevich +4 more |
2024-04-30 |
| 11947256 |
Simultaneous double-side coating of multilayer graphene pellicle by local thermal processing |
Evgenia KURGANOVA, Adrianus Johannes Maria Giesbers, Maxim Aleksandrovich Nasalevich, Mária Péter, Pieter-Jan Van Zwol +2 more |
2024-04-02 |
| 11762281 |
Membrane for EUV lithography |
Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns +17 more |
2023-09-19 |
| 11754918 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Chaitanya Krishna ANDE, Antonius Franciscus Johannes De Groot, Adrianus Johannes Maria Giesbers, Johannes Joseph Janssen +18 more |
2023-09-12 |
| 11686997 |
Metal-silicide-nitridation for stress reduction |
Pieter-Jan Van Zwol, Adrianus Johannes Maria Giesbers, Johan Hendrik Klootwijk, Evgenia KURGANOVA, Maxim Aleksandrovich Nasalevich +4 more |
2023-06-27 |
| 11635681 |
Mask assembly and associated methods |
Derk Servatius Gertruda Brouns, Dennis De Graaf, Robertus Cornelis Martinus De Kruif, Paul Janssen, Matthias Kruizinga +3 more |
2023-04-25 |
| 11467486 |
Graphene pellicle lithographic apparatus |
Evgenia KURGANOVA, Adrianus Johannes Maria Giesbers, Alexander Ludwig KLEIN, Maxim Aleksandrovich Nasalevich, Mária Péter +4 more |
2022-10-11 |
| 11347142 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil +9 more |
2022-05-31 |
| 11314163 |
Pellicle frame and pellicle assembly |
Anton Wilhelmus Duys, Maxim Aleksandrovich Nasalevich, Mária Péter, Pieter-Jan Van Zwol, David Ferdinand Vles |
2022-04-26 |
| 11287737 |
Metal-silicide-nitridation for stress reduction |
Pieter-Jan Van Zwol, Adrianus Johannes Maria Giesbers, Johan Hendrik Klootwijk, Evgenia KURGANOVA, Maxim Aleksandrovich Nasalevich +4 more |
2022-03-29 |
| 11231646 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Chaitanya Krishna ANDE, Antonius Franciscus Johannes De Groot, Adrianus Johannes Maria Giesbers, Johannes Joseph Janssen +18 more |
2022-01-25 |
| 11029595 |
Mask assembly and associated methods |
Derk Servatius Gertruda Brouns, Dennis De Graaf, Robertus Cornelis Martinus De Kruif, Paul Janssen, Matthias Kruizinga +3 more |
2021-06-08 |
| 10983431 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil +9 more |
2021-04-20 |
| 10908496 |
Membrane for EUV lithography |
Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns +17 more |
2021-02-02 |
| 10571800 |
Mask assembly and associated methods |
Derk Servatius Gertruda Brouns, Dennis De Graaf, Robertus Cornelis Martinus De Kruif, Paul Janssen, Matthias Kruizinga +3 more |
2020-02-25 |
| 10466585 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil +9 more |
2019-11-05 |
| 9939737 |
Electrostatic clamp |
Petrus Augustinus Franciscus Klomp, Bastiaan Mertens |
2018-04-10 |
| 9494875 |
Chuck, a chuck control system, a lithography apparatus and a method of using a chuck |
Sebastiaan Maria Johannes Cornelissen, Noud Jan Gilissen, Anko Jozef Cornelus Sijben, Roger W. Schmitz, Ronald Van Der Wilk +1 more |
2016-11-15 |
| 9429857 |
Electrostatic clamp, lithographic apparatus and method |
Ronald Van Der Wilk, Roger W. Schmitz, Manon Elise Will |
2016-08-30 |