Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10775707 | Lithographic apparatus and method | Güneş Nakibo{hacek over (g)}lu, Sander Catharina Reinier Derks, Johannes Wilhelmus Mollen | 2020-09-15 |
| 9494875 | Chuck, a chuck control system, a lithography apparatus and a method of using a chuck | Sebastiaan Maria Johannes Cornelissen, Noud Jan Gilissen, Anko Jozef Cornelus Sijben, Roger W. Schmitz, Arnoud Willem Notenboom +1 more | 2016-11-15 |
| 9429857 | Electrostatic clamp, lithographic apparatus and method | Ronald Van Der Wilk, Roger W. Schmitz, Arnoud Willem Notenboom | 2016-08-30 |