| 12235592 |
Object holder, electrostatic sheet and method for making an electrostatic sheet |
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Koos Van Berkel, Marcus Adrianus Van De Kerkhof, Roger Franciscus Mattheus Maria Hamelinck, Shahab Shervin +7 more |
2025-02-25 |
| 11762281 |
Membrane for EUV lithography |
Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns +17 more |
2023-09-19 |
| 11635681 |
Mask assembly and associated methods |
Derk Servatius Gertruda Brouns, Dennis De Graaf, Robertus Cornelis Martinus De Kruif, Paul Janssen, Arnoud Willem Notenboom +3 more |
2023-04-25 |
| 11086213 |
Mask assembly and associated methods |
Derk Servatius Gertruda Brouns, Dennis De Graaf, Robertus Cornelis Martinus De Kruif, Paul Janssen, Amoud Willem Notenboom +3 more |
2021-08-10 |
| 11029595 |
Mask assembly and associated methods |
Derk Servatius Gertruda Brouns, Dennis De Graaf, Robertus Cornelis Martinus De Kruif, Paul Janssen, Arnoud Willem Notenboom +3 more |
2021-06-08 |
| 11009803 |
Mask assembly |
Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Erik Willem Bogaart, Derk Servatius Gertruda Brouns, Marc Bruijn +17 more |
2021-05-18 |
| 11003098 |
Pellicle attachment apparatus |
Frits Van Der Meulen, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn +19 more |
2021-05-11 |
| 10969701 |
Pellicle attachment apparatus |
Frits Van Der Meulen, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn +19 more |
2021-04-06 |
| 10908496 |
Membrane for EUV lithography |
Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns +17 more |
2021-02-02 |
| 10571800 |
Mask assembly and associated methods |
Derk Servatius Gertruda Brouns, Dennis De Graaf, Robertus Cornelis Martinus De Kruif, Paul Janssen, Arnoud Willem Notenboom +3 more |
2020-02-25 |
| 10558129 |
Mask assembly |
Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Erik Willem Bogaart, Derk Servatius Gertruda Brouns, Marc Bruijn +17 more |
2020-02-11 |
| 10539886 |
Pellicle attachment apparatus |
Frits Van Der Meulen, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn +19 more |
2020-01-21 |
| 8599356 |
Shutter member, a lithographic apparatus and device manufacturing method |
Takeshi Kaneko, Erik Henricus Egidius Catharina Eummelen, Nina Vladimirovna Dziomkina |
2013-12-03 |
| 8189174 |
Lithographic apparatus provided with a swap bridge |
Frank Auer, Fransiscus Mathijs Jacobs, Ronnie Herman Anna Hensen |
2012-05-29 |