Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11169447 | Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | — | 2021-11-09 |
| 11009803 | Mask assembly | Matthias Kruizinga, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn +17 more | 2021-05-18 |
| 10754258 | Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | — | 2020-08-25 |
| 10585363 | Alignment system | Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Alessandro Polo, Patricius Aloysius Jacobus Tinnemans, Adrianus Johannes Hendrikus Schellekens +3 more | 2020-03-10 |
| 10558129 | Mask assembly | Matthias Kruizinga, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn +17 more | 2020-02-11 |
| 10042260 | Device for monitoring a radiation source, radiation source, method of monitoring a radiation source, device manufacturing method | Chuangxin Zhao | 2018-08-07 |
| 9983485 | Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | — | 2018-05-29 |
| 9835954 | Inspection method and apparatus, substrates for use therein and device manufacturing method | Franciscus Godefridus Casper Bijnen, Arie Jeffrey Den Boef, Simon Gijsbert Josephus Mathijssen | 2017-12-05 |
| 9778025 | Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method | Simon Gijsbert Josephus Mathijssen, Patricius Aloysius Jacobus Tinnemans, Arie Jeffrey Den Boef | 2017-10-03 |
| 9696638 | Lithographic apparatus | Engelbertus Antonius Fransiscus Van Der Pasch, Joost Jeroen Ottens, Emiel Jozef Melanie Eussen, Johannes Henricus Wilhelmus Jacobs, William Peter Van Drent +2 more | 2017-07-04 |
| 9229340 | Lithographic apparatus | Engelbertus Antonius Fransiscus Van Der Pasch, Joost Jeroen Ottens, Emiel Jozef Melanie Eussen, Johannes Henricus Wilhelmus Jacobs, William Peter Van Drent +2 more | 2016-01-05 |
| 8570492 | Lithographic apparatus | Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Johannes Henricus Wilhelmus Jacobs, Joost Jeroen Ottens, Frank Staals +2 more | 2013-10-29 |