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Contamination trap |
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2024-05-14 |
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Prolonging optical element lifetime in an EUV lithography system |
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2023-12-19 |
| 11556067 |
Contamination trap |
Sander Catharina Reinier Derks, Daniel Jozef Maria Direcks, Maurice Wilhelmus Leonardus Hendricus Feijts, Pieter Gerardus Mathijs Hoeijmakers, Katja Cornelia Joanna Clasina Moors +2 more |
2023-01-17 |
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Prolonging optical element lifetime in an EUV lithography system |
Yue Ma, Antonius Theodorus Wilhelmus Kempen, Klaus Hummler, Johannes Hubertus Josephina Moors, Jeroen Hubert Rommers +20 more |
2022-05-24 |
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Optical diffraction component for suppressing at least one target wavelength by destructive interference |
Heiko Feldmann, Valentin Jonatan Bolsinger, Jozef Petrus Henricus Benschop |
2021-12-07 |
| 11022902 |
Sensor, lithographic apparatus, and device manufacturing method |
Arie Jeffrey Den Boef, Patricius Aloysius Jacobus Tinnemans, Haico Victor Kok, Sebastianus Adrianus GOORDEN |
2021-06-01 |
| 10852640 |
Optical diffraction component for suppressing at least one target wavelength by destructive interference |
Heiko Feldmann, Valentin Jonatan Bolsinger, Jozef Petrus Henricus Benschop |
2020-12-01 |
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Lithographic apparatus |
Engelbertus Antonius Fransiscus Van Der Pasch, Joost Jeroen Ottens, Emiel Jozef Melanie Eussen, Johannes Henricus Wilhelmus Jacobs, Frank Staals +2 more |
2017-07-04 |
| 9229340 |
Lithographic apparatus |
Engelbertus Antonius Fransiscus Van Der Pasch, Joost Jeroen Ottens, Emiel Jozef Melanie Eussen, Johannes Henricus Wilhelmus Jacobs, Frank Staals +2 more |
2016-01-05 |
| 8619235 |
Lithographic apparatus and device manufacturing method |
— |
2013-12-31 |
| 8570492 |
Lithographic apparatus |
Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Johannes Henricus Wilhelmus Jacobs, Joost Jeroen Ottens, Frank Staals +2 more |
2013-10-29 |
| 6163509 |
Magneto-optical recording medium and magneto-optical recorder using the medium |
Takao Suzuki |
2000-12-19 |
| 6096446 |
Magnetooptical recording medium and method of producing the same |
Takao Suzuki, Yusuke Itoh |
2000-08-01 |
| 5822063 |
Apparatus for measuring magneto-optical effect |
Takao Suzuki |
1998-10-13 |