Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11875966 | Method and apparatus for inspection | Bernardo Kastrup, Johannes Catharinus Hubertus Mulkens, Marinus Aart Van Den Brink, Erwin Paul SMAKMAN, Tamara Druzhinina +1 more | 2024-01-16 |
| 11194256 | Optical diffraction component for suppressing at least one target wavelength by destructive interference | Heiko Feldmann, Valentin Jonatan Bolsinger, William Peter Van Drent | 2021-12-07 |
| 11094502 | Method and apparatus for inspection | Bernardo Kastrup, Johannes Catharinus Hubertus Mulkens, Marinus Aart Van Den Brink, Erwin Paul SMAKMAN, Tamara Druzhinina +1 more | 2021-08-17 |
| 10852640 | Optical diffraction component for suppressing at least one target wavelength by destructive interference | Heiko Feldmann, Valentin Jonatan Bolsinger, William Peter Van Drent | 2020-12-01 |
| 10698312 | Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane | Pieter-Jan Van Zwol, Vadim Yevgenyevich Banine, Florian Didier Albin Dhalluin, Mária Péter, Luigi Scaccabarozzi +1 more | 2020-06-30 |
| RE47943 | Dual stage lithographic apparatus and device manufacturing method | Marinus Aart Van Den Brink, Erik Roelof Loopstra | 2020-04-14 |
| 10228615 | Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane | Andrey Nikipelov, Vadim Yevgenyevich Banine, Arjen Boogaard, Florian Didier Albin Dhalluin, Alexey Sergeevich Kuznetsov +5 more | 2019-03-12 |
| RE46933 | Dual stage lithographic apparatus and device manufacturing method | Marinus Aart Van Den Brink, Erik Roelof Loopstra | 2018-07-03 |
| 9335638 | Lithographic apparatus, programmable patterning device and lithographic method | Pieter Willem Herman De Jager, Vadim Yevgenyevich Banine, Cheng-Qun Gui, Johannes Onvlee, Erwin John Van Zwet | 2016-05-10 |
| 9304401 | Measurement of the position of a radiation beam spot in lithography | Felix Godfried Peter Peeters, Michael Jozef Mathijs Renkens, Gregor Edward Van Baars, Jeroen Dekkers | 2016-04-05 |
| RE45576 | Dual stage lithographic apparatus and device manufacturing method | Marinus Aart Van Den Brink, Erik Roelof Loopstra | 2015-06-23 |
| 8941815 | Substrate table for a lithographic apparatus, lithographic apparatus, method of using a substrate table and device manufacturing method | Raymond Wilhelmus Louis Lafarre, Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Gerardus Adrianus Antonius Maria Kusters, Alexander Nikolov Zdravkov +2 more | 2015-01-27 |
| 8902403 | Lithographic apparatus and device manufacturing method | Martinus Hendrikus Antonius Leenders, Alexander Padiy, Tao Chen | 2014-12-02 |
| 8842293 | Level sensor arrangement for lithographic apparatus and device manufacturing method | Arie Jeffrey Den Boef, Ralph Brinkhof, Lukasz Jerzy Macht | 2014-09-23 |
| 8675210 | Level sensor, lithographic apparatus, and substrate surface positioning method | Arie Jeffrey Den Boef, Ralph Brinkhof, Willem Jurrianus Venema, Lukasz Jerzy Macht, Laurent Khuat Duy +1 more | 2014-03-18 |
| 8654311 | Lithographic apparatus and device manufacturing method | Harry Sewell | 2014-02-18 |
| 8531648 | Lithographic apparatus, programmable patterning device and lithographic method | Pieter Willem Herman De Jager, Vadim Yevgenyevich Banine, Cheng-Qun Gui, Johannes Onvlee, Erwin John Van Zwet | 2013-09-10 |
| 8339571 | Lithographic method and apparatus | Harry Sewell | 2012-12-25 |
| RE43576 | Dual stage lithographic apparatus and device manufacturing method | Marinus Aart Van Den Brink, Erik Roelof Loopstra | 2012-08-14 |
| 7760324 | Lithographic apparatus and device manufacturing method | Hans Butler, Nicolaas Rudolf Kemper, Bartholomeus Hendricus Koek, Frits Van Der Meulen, Harmen Klaas Van Der Schoot | 2010-07-20 |
| 7394524 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Arno Jan Bleeker | 2008-07-01 |
| 7173687 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Arno Jan Bleeker | 2007-02-06 |
| 7161659 | Dual stage lithographic apparatus and device manufacturing method | Marinus Aart Van Den Brink, Erik Roelof Loopstra | 2007-01-09 |
| 7110087 | Lithographic apparatus and device manufacturing method | Johannes Catharinus Hubertus Mulkens | 2006-09-19 |
| 6999161 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Arno Jan Bleeker | 2006-02-14 |