Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12313980 | Inspection system, lithographic apparatus, and inspection method | Alexey Olegovich POLYAKOV, Andrey Nikipelov, Albertus Victor Gerardus MANGNUS | 2025-05-27 |
| 12165836 | Systems and methods of profiling charged-particle beams | Maikel Robert GOOSEN | 2024-12-10 |
| 11942302 | Pulsed charged-particle beam system | Arno Jan Bleeker, Pieter Willem Herman De Jager, Maikel Robert GOOSEN, Albertus Victor Gerardus MANGNUS, Yan Ren +1 more | 2024-03-26 |
| 11881374 | Apparatus for and method of controlling an energy spread of a charged-particle beam | Shakeeb Bin HASAN, Yan Ren, Maikel Robert GOOSEN, Albertus Victor Gerardus MANGNUS | 2024-01-23 |
| 11875966 | Method and apparatus for inspection | Bernardo Kastrup, Johannes Catharinus Hubertus Mulkens, Marinus Aart Van Den Brink, Jozef Petrus Henricus Benschop, Tamara Druzhinina +1 more | 2024-01-16 |
| 11791132 | Aperture array with integrated current measurement | Albertus Victor Gerardus MANGNUS, Maikel Robert GOOSEN | 2023-10-17 |
| 11747738 | Determining the combination of patterns to be applied to a substrate in a lithography step | Coen Adrianus Verschuren | 2023-09-05 |
| 11243179 | Inspection tool, lithographic apparatus, electron beam source and an inspection method | Albertus Victor Gerardus MANGNUS, Thomas Jarik HUISMAN | 2022-02-08 |
| 11094502 | Method and apparatus for inspection | Bernardo Kastrup, Johannes Catharinus Hubertus Mulkens, Marinus Aart Van Den Brink, Jozef Petrus Henricus Benschop, Tamara Druzhinina +1 more | 2021-08-17 |
| 10928736 | Method and apparatus for direct write maskless lithography | Pieter Willem Herman De Jager, Coen Adrianus Verschuren, Erwin John Van Zwet, Wouter Frans Willem Mulckhuyse, Pieter Verhoeff +1 more | 2021-02-23 |
| 10712669 | Method and apparatus for direct write maskless lithography | Coen Adrianus Verschuren | 2020-07-14 |
| 10527950 | Apparatus for direct write maskless lithography | Coen Adrianus Verschuren | 2020-01-07 |