Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422387 | Charged particle optical device, objective lens assembly, detector, detector array, and methods | Marco Jan-Jaco Wieland | 2025-09-23 |
| 12394589 | Charged particle device, detector, and methods | Erwin Slot | 2025-08-19 |
| 12325911 | Method and apparatus for forming a patterned layer of material | Tamara Druzhinina, Jim Vincent Overkamp, Alexey Olegovich POLYAKOV, Teis Johan Coenen, Evgenia KURGANOVA +4 more | 2025-06-10 |
| 12313980 | Inspection system, lithographic apparatus, and inspection method | Alexey Olegovich POLYAKOV, Erwin Paul SMAKMAN, Andrey Nikipelov | 2025-05-27 |
| 12230469 | Apparatus for and method of local control of a charged particle beam | Maikel Robert GOOSEN | 2025-02-18 |
| 12125671 | Multi-source charged particle illumination apparatus | Stijn Wilem Herman Karel STEENBRINK, Marco Jan-Jaco Wieland | 2024-10-22 |
| 11961700 | Systems and methods for image enhancement for a multi-beam charged-particle inspection system | Maikel Robert GOOSEN, Lucas KUINDERSMA | 2024-04-16 |
| 11942302 | Pulsed charged-particle beam system | Arno Jan Bleeker, Pieter Willem Herman De Jager, Maikel Robert GOOSEN, Erwin Paul SMAKMAN, Yan Ren +1 more | 2024-03-26 |
| 11942303 | Systems and methods for real time stereo imaging using multiple electron beams | Yan Ren | 2024-03-26 |
| 11881374 | Apparatus for and method of controlling an energy spread of a charged-particle beam | Shakeeb Bin HASAN, Yan Ren, Maikel Robert GOOSEN, Erwin Paul SMAKMAN | 2024-01-23 |
| 11821859 | Charged particle optical device, objective lens assembly, detector, detector array, and methods | Marco Jan-Jaco Wieland | 2023-11-21 |
| 11791132 | Aperture array with integrated current measurement | Maikel Robert GOOSEN, Erwin Paul SMAKMAN | 2023-10-17 |
| 11442368 | Inspection tool, inspection method and computer program product | Richard Quintanilha, Scott Anderson Middlebrooks, Adrianus Cornelis Matheus Koopman | 2022-09-13 |
| 11243179 | Inspection tool, lithographic apparatus, electron beam source and an inspection method | Erwin Paul SMAKMAN, Thomas Jarik HUISMAN | 2022-02-08 |