Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12399428 | Method and apparatus for forming a patterned layer of material | Evgenia KURGANOVA, Gosse Charles De Vries, Jim Vincent Overkamp, Teis Johan Coenen, Tamara Druzhinina +2 more | 2025-08-26 |
| 12325911 | Method and apparatus for forming a patterned layer of material | Tamara Druzhinina, Jim Vincent Overkamp, Teis Johan Coenen, Evgenia KURGANOVA, Ionel Mugurel Ciobica +4 more | 2025-06-10 |
| 12313980 | Inspection system, lithographic apparatus, and inspection method | Erwin Paul SMAKMAN, Andrey Nikipelov, Albertus Victor Gerardus MANGNUS | 2025-05-27 |
| 12271008 | Transmissive diffusor | Andrey Nikipelov, Marcus Adrianus Van De Kerkhof, Pieter-Jan Van Zwol, Laurentius Cornelius De Winter, Wouter Joep ENGELEN | 2025-04-08 |
| 11996267 | Particle beam apparatus, defect repair method, lithographic exposure process and lithographic system | Ruben Cornelis MAAS, Teis Johan Coenen | 2024-05-28 |
| 11415886 | Lithographic patterning process and resists to use therein | Sander Frederik Wuister, Oktay Yildirim, Gijsbert Rispens | 2022-08-16 |
| 11232960 | Pick-and-place tool having multiple pick up elements | Yang-Shan Huang, Coen Adrianus Verschuren, Pieter Willem Herman De Jager | 2022-01-25 |
| 10948837 | Information determining apparatus and method | An Lin Gao, Sanjaysingh Lalbahadoersing, Andrey Nikipelov, Brennan Peterson | 2021-03-16 |
| 10555407 | Metrology methods, radiation source, metrology apparatus and device manufacturing method | Richard Quintanilha, Vadim Yevgenyevich Banine, Coen Adrianus Verschuren | 2020-02-04 |
| 10416555 | Lithographic patterning process and resists to use therein | Sander Frederik Wuister, Oktay Yildirim, Gijsbert Rispens | 2019-09-17 |
| 10342108 | Metrology methods, radiation source, metrology apparatus and device manufacturing method | Richard Quintanilha, Vadim Yevgenyevich Banine, Coen Adrianus Verschuren | 2019-07-02 |
| 9723290 | Method for generating, transmitting and receiving stereoscopic images and relating devices | Paolo D'Amato, Giovanni Ballocca, Fedor Bushlanov | 2017-08-01 |