Method and apparatus for forming a patterned layer of material

Assignee

• Asml Netherlands B.V.

Inventors

• Evgenia KURGANOVA (11 patents)
• Gosse Charles De Vries (27 patents)
• Alexey Olegovich POLYAKOV (12 patents)
• Jim Vincent Overkamp (20 patents)
• Teis Johan Coenen (11 patents)
• Tamara Druzhinina (11 patents)
• Sonia Castellanos Ortega (3 patents)
• Olivier Christian Maurice LUGIER (2 patents)

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