Object holder, tool and method of manufacturing an object holder

Assignee

• Asml Netherlands B.V.

Inventors

• Bastiaan Lambertus Wilhelmus Marinus Van De Ven (23 patents)
• Johannes Bernardus Charles ENGELEN (2 patents)
• Arnoud Willem Notenboom (25 patents)
• Jim Vincent Overkamp (20 patents)
• Kjeld Gertrudus Hendrikus Janssen (4 patents)
• Johannes Adrianus Cornelis Maria Pijnenburg (9 patents)
• Jeroen Van Duivenbode (6 patents)
• Erik Johannes Nieuwenhuis (1 patents)
• Koos Van Berkel (11 patents)

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