Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12235592 | Object holder, electrostatic sheet and method for making an electrostatic sheet | Koos Van Berkel, Marcus Adrianus Van De Kerkhof, Roger Franciscus Mattheus Maria Hamelinck, Shahab Shervin, Marinus Augustinus Christiaan Verschuren +7 more | 2025-02-25 |
| 12197139 | Object holder, tool and method of manufacturing an object holder | Johannes Bernardus Charles ENGELEN, Arnoud Willem Notenboom, Jim Vincent Overkamp, Kjeld Gertrudus Hendrikus Janssen, Johannes Adrianus Cornelis Maria Pijnenburg +3 more | 2025-01-14 |
| 10904994 | Supply system for an extreme ultraviolet light source | Koen Gerhardus Winkels, Georgiy O. Vaschenko, Theodorus Wilhelmus Driessen, Johan Frederik Dijksman, Wilhelmus Henricus Theodorus Maria Aangenent | 2021-01-26 |
| 10750604 | Droplet generator for lithographic apparatus, EUV source and lithographic apparatus | Johan Frederik Dijksman, Wilhelmus Henricus Theodorus Maria Aangenent, Ronald Johannes Hultermans, Peter van Putten | 2020-08-18 |
| 10499485 | Supply system for an extreme ultraviolet light source | Koen Gerhardus Winkels, Georgiy O. Vaschenko, Theodorus Wilhelmus Driessen, Johan Frederik Dijksman, Wilhelmus Henricus Theodorus Maria Aangenent | 2019-12-03 |
| 10481498 | Droplet generator for lithographic apparatus, EUV source and lithographic apparatus | Johan Frederik Dijksman, Koen Gerhardus Winkels, Theodorus Wilhelmus Driessen, Georgiy O. Vaschenko, Peter Michael Baumgart +4 more | 2019-11-19 |
| 9921494 | Lithographic apparatus comprising an actuator, and method for protecting such actuator | Theodorus Petrus Maria Cadee, Sander Christiaan Broers, Sven Antoin Johan Hol, Yang-Shan Huang, Antonius Franciscus Johannes De Groot | 2018-03-20 |
| 9753381 | Substrate table system, lithographic apparatus and substrate table swapping method | Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Hans Butler | 2017-09-05 |
| 9726985 | Stage system and a lithographic apparatus | Antonius Franciscus Johannes De Groot, Johannes Petrus Martinus Bernardus Vermeulen, Theodorus Petrus Maria Cadee, Robertus Mathijs Gerardus Rijs, Richard Henricus Adrianus Van Lieshout | 2017-08-08 |
| 9329501 | Lithographic apparatus, method of deforming a substrate table and device manufacturing method | Yang-Shan Huang, Hans Butler, Jan Van Eijk, Sven Antoin Johan Hol, Engelbertus Antonius Fransiscus Van Der Pasch +3 more | 2016-05-03 |
| 9141003 | Lithographic apparatus and device manufacturing method | Ruud Antonius Catharina Maria Beerens, Sjoerd Nicolaas Lambertus Donders, Engelbertus Antonius Fransiscus Van Der Pasch, Johannes Petrus Martinus Bernardus Vermeulen | 2015-09-22 |
| 8184266 | Lithographic apparatus and device manufacturing method | Jeroen Pieter Starreveld | 2012-05-22 |
| 7978307 | Gas bearing, and lithographic apparatus provided with such a bearing | Johannes Adrianus Antonius Theodorus Dams, Jacob Willem Vink | 2011-07-12 |
| 7839489 | Assembly of a reticle holder and a reticle | Gert-Jan Heerens | 2010-11-23 |
| 7781237 | Alignment marker and lithographic apparatus and device manufacturing method using the same | Gert-Jan Heerens, Anastasius Jacobus Anicetus Bruinsma, Jacob Klinkhamer, Hubert Adriaan Van Mierlo, Willem Vliegenthart | 2010-08-24 |
| 7466397 | Safety mechanism for a lithographic patterning device | Gert-Jan Heerens | 2008-12-16 |
| 7423733 | Lithographic apparatus, device manufacturing method, and device manufactured thereby with docking system for positioning a patterning device | Gert-Jan Heerens, Robert Gabriël Maria Lansbergen, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra | 2008-09-09 |
| 7236233 | Assembly of a reticle holder and a reticle | Gert-Jan Heerens | 2007-06-26 |
| 7153612 | Mask handling method, and mask and device or apparatus comprising a gripper therefor, device manufacturing method and device manufactured thereby | Gart-Jan Heerens, Erik Ham | 2006-12-26 |
| 7123344 | Lithographic apparatus and device manufacturing method | Erik Ham | 2006-10-17 |
| 7084961 | Safety mechanism for a lithographic patterning device | Gert-Jan Heerens | 2006-08-01 |
| 7053980 | Lithographic alignment system | Gert-Jan Heerens | 2006-05-30 |
| 6753945 | Transfer method for a mask or substrate, storage box, apparatus adapted for use in such method, and device manufacturing method including such a transfer method | Gert-Jan Heerens, Robert Gabriël Maria Lansbergen, Erik Ham | 2004-06-22 |