Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11569016 | Coil assembly for magnetic actuator, magnetic actuator and manufacturing method | — | 2023-01-31 |
| 10191392 | Actuator, positioning device, lithographic apparatus, and method for manufacturing an actuator | Dirk Hendrikus Marinus ENGELEN, Peter Michel Silvester Maria Heijmans, Simon Bernardus Cornelis Maria Martens, Hans Butler, Antonius Franciscus Johannes De Groot | 2019-01-29 |
| 8922197 | Speed sensor | Lambertus Gerardus Cornelis Van Den Broek | 2014-12-30 |
| 8803644 | Magnetic actuator | — | 2014-08-12 |
| 8077287 | Method of preparing components, prepared component, lithographic apparatus and device manufacturing method | Mark Kroon, Harm-Jan Voorma, Carolus Ida Maria Antonius Spee | 2011-12-13 |
| 7978307 | Gas bearing, and lithographic apparatus provided with such a bearing | Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Jacob Willem Vink | 2011-07-12 |
| 7541699 | Magnet assembly, linear actuator, planar motor and lithographic apparatus | — | 2009-06-02 |
| 7385678 | Positioning device and lithographic apparatus | — | 2008-06-10 |
| 7385679 | Lithographic apparatus and actuator | — | 2008-06-10 |
| 7307689 | Lithographic apparatus, reticle masking device for a lithographic apparatus, gas bearing and apparatus comprising such gas bearing | Maurice Philippe Du Mee, Edwin Johan Buis, Johannes Andreas Henricus Maria Jacobs, Antoine Hendrik Verweij, Erik Maria Rekkers | 2007-12-11 |
| 7280182 | Lithographic apparatus, device manufacturing method and computer program | Robrecht De Weerdt | 2007-10-09 |
| 7259832 | Lithographic apparatus and device manufacturing method | — | 2007-08-21 |
| 7184123 | Lithographic optical system | Johannes Martinus Duisters, Wilfred Edward Endendijk | 2007-02-27 |
| 7145634 | Lithographic apparatus and device manufacturing method | Johannes Hendrik Everhardus Aldegonda Muijderman | 2006-12-05 |
| 7126666 | Lithographic apparatus, device manufacturing method and device manufactured thereby | Robrecht De Weerdt | 2006-10-24 |
| 7084956 | Supporting device, lithographic apparatus, and device manufacturing method employing a supporting device, and a position control system arranged for use in a supporting device | Frank Auer | 2006-08-01 |
| 7061587 | Control system, lithographic apparatus, device manufacturing method, and device manufactured thereby | — | 2006-06-13 |
| 6885117 | Magnetic actuator under piezoelectric control | Robrecht De Weerdt | 2005-04-26 |