Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7280182 | Lithographic apparatus, device manufacturing method and computer program | Johannes Adrianus Antonius Theodorus Dams | 2007-10-09 |
| 7161657 | Lithographic apparatus and device manufacturing method | — | 2007-01-09 |
| 7126666 | Lithographic apparatus, device manufacturing method and device manufactured thereby | Johannes Adrianus Antonius Theodorus Dams | 2006-10-24 |
| 6998737 | Lithographic apparatus and device manufacturing method | — | 2006-02-14 |
| 6885117 | Magnetic actuator under piezoelectric control | Johannes Adrianus Antonius Theodorus Dams | 2005-04-26 |
| 6831285 | Lithographic apparatus, magnetic support for use therein, device manufacturing method, and device manufactured thereby | Sven Antoin Johan Hol, Edwin Johan Buis | 2004-12-14 |