| 11764027 |
Systems and methods of cooling objective lens of a charged-particle beam system |
Jeroen Gerard Gosen, Martijn Petrus Christianus Van Heumen, Dennis Herman Caspar Van Banning, Naseh Hosseini |
2023-09-19 |
| 11621142 |
Substrate positioning device and electron beam inspection tool |
Marcel Koenraad Marie Baggen, Peter Paul HEMPENIUS, Maarten Frans Janus Kremers, Robertus Jacobus Theodorus Van Kempen, Henricus Martinus Johannes Van De Groes +3 more |
2023-04-04 |
| 11315752 |
E-beam apparatus |
Peter Paul HEMPENIUS, Maarten Frans Janus Kremers, Henricus Martinus Johannes Van De Groes, Niels Johannes Maria Bosch, Marcel Koenraad Marie Baggen |
2022-04-26 |
| 10867770 |
E-beam apparatus |
Peter Paul HEMPENIUS, Maarten Frans Janus Kremers, Henricus Martinus Johannes Van De Groes, Niels Johannes Maria Bosch, Marcel Koenraad Marie Baggen |
2020-12-15 |
| 10372045 |
Method of calibrating a reluctance actuator assembly, reluctance actuator and lithographic apparatus comprising such reluctance actuator |
Johannes Antonius Gerardus Akkermans, Bas Pieter Lemmen, Sjoerd Martijn Huiberts, Joeri Lof, Petrus Theodorus Rutgers +2 more |
2019-08-06 |
| 9927711 |
Actuation mechanism, optical apparatus and lithography apparatus |
Andrea Lodovico Mancuso, Hendricus Johannes Maria Meijer, Erik Maria Rekkers, Marinus Johannes Maria Van Dam |
2018-03-27 |
| 9921494 |
Lithographic apparatus comprising an actuator, and method for protecting such actuator |
Theodorus Petrus Maria Cadee, Sander Christiaan Broers, Yang-Shan Huang, Antonius Franciscus Johannes De Groot, Bastiaan Lambertus Wilhelmus Marinus Van De Ven |
2018-03-20 |
| 9785051 |
Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices |
Jan Bernard Plechelmus Van Schoot, Edwin Johan Buis, Erik Maria Rekkers, Gosse Charles De Vries, Hako Botma +2 more |
2017-10-10 |
| 9535340 |
Support for a movable element and lithography apparatus |
Fidelus Adrianus Boon, Olof Martinus Josephus Fischer |
2017-01-03 |
| 9494869 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Arno Jan Bleeker, Pieter Renaat Maria Hennus, Martinus Hendricus Hoeks, Harmen Klaas Van Der Schoot +9 more |
2016-11-15 |
| 9494878 |
Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices |
Edwin Johan Buis, Gosse Charles De Vries, Erik Maria Rekkers |
2016-11-15 |
| 9329501 |
Lithographic apparatus, method of deforming a substrate table and device manufacturing method |
Yang-Shan Huang, Hans Butler, Jan Van Eijk, Engelbertus Antonius Fransiscus Van Der Pasch, Bastiaan Lambertus Wilhelmus Marinus Van De Ven +3 more |
2016-05-03 |
| 9293951 |
Lithographic apparatus and lorentz actuator |
Fidelus Adrianus Boon, Hendrikus Pascal Gerardus Johannes Van Agtmaal, Abdelhamid Kechroud, Peter Michel Silvester Maria Heijmans |
2016-03-22 |
| 9172294 |
Planar motor and lithographic apparatus comprising such planar motor |
Edwin Johan Buis, Erwin Wijn |
2015-10-27 |
| 9110387 |
Lithographic apparatus comprising a substrate table and a surface substrate actuator |
Hans Butler, Jan Van Eijk, Johannes Petrus Martinus Bernardus Vermeulen, Yang-Shan Huang |
2015-08-18 |
| 9081307 |
Variable reluctance device, stage apparatus, lithographic apparatus and device manufacturing method |
Johannes Petrus Martinus Bernardus Vermeulen, Wilhelmus Henricus Theodorus Maria Aangenent, George Wilhelmus Johannes Clijsen, Johannes Antonius Gerardus Akkermans, Jacob Kornelis Ter Veer +1 more |
2015-07-14 |
| 8896811 |
Positioning system and a method for positioning a substage with respect to a frame |
Jan Van Eijk, Antonius Franciscus Johannes De Groot, Johannes Petrus Martinus Bernardus Vermeulen, Geert-Jan Petrus Naaijkens, Marijn Kessels +1 more |
2014-11-25 |
| 8687171 |
Electromagnetic actuator, stage apparatus and lithographic apparatus |
Jan Van Eijk, Johannes Petrus Martinus Bernardus Vermeulen, Gerard Johannes Pieter Nijsse, Simon Bernardus Cornelis Maria Martens, Yang-Shan Huang +4 more |
2014-04-01 |
| 8472010 |
Actuator, positioning system and lithographic apparatus |
Antonius Franciscus Johannes De Groot, Theodorus Petrus Maria Cadee, Marijn Kessels, Daniël Godfried Emma Hobbelen |
2013-06-25 |
| 7956982 |
Apparatus for cooling |
Angelo Cesar Peter De Klerk, Erik Roelof Loopstra, Fransicus Mathijs Jacobs, Mark Scholten |
2011-06-07 |
| 7696652 |
Electromagnetic actuator, method of manufacturing a part of an electromagnetic actuator, and lithographic apparatus comprising and electromagnetic actuator |
Erik Roelof Loopstra |
2010-04-13 |
| 7468589 |
Lithographic apparatus having a controlled motor, and motor control system and method |
Henrikus Herman Marie Cox, Hans Butler |
2008-12-23 |
| 7459808 |
Lithographic apparatus and motor |
Angelo Cesar Peter De Klerk, Erik Roelof Loopstra, Fransicus Mathijs Jacobs, Mark Scholten, Arjan Franklin Bakker |
2008-12-02 |
| 7456935 |
Lithographic apparatus and device manufacturing method utilizing a positioning device for positioning an object table |
Henrikus Herman Marie Cox, Petrus Matthijs Henricus Vosters |
2008-11-25 |
| 7245047 |
Lithographic apparatus and device manufacturing method |
Patricia Vreugdewater, Henrikus Herman Marie Cox, Harmen Klaas Van Der Schoot |
2007-07-17 |