Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7742149 | Stage system and lithographic apparatus comprising such a stage system | Youssef Karel Maria De Vos, Ronald Casper Kunst, Peter Paul HEMPENIUS | 2010-06-22 |
| 7245047 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox, Sven Antoin Johan Hol, Harmen Klaas Van Der Schoot | 2007-07-17 |
| 7224429 | Lithographic apparatus, device manufacturing method and positioning system | Sven Antoin Johan Hol, Edwin Johan Buis | 2007-05-29 |
| 7161267 | Displacement apparatus, litographic apparatus, device manufacturing method, and device manufactured thereby | Sven Antoin Johan Hol, Johan Cornelis Compter, Erik Roelof Loopstra | 2007-01-09 |
| 7145269 | Lithographic apparatus, Lorentz actuator, and device manufacturing method | Sven Antoin Johan Hol, Henrikus Herman Marie Cox, Hernes Jacobs, Koen Jacobus Johannes Maria Zaal | 2006-12-05 |
| 7095485 | Lithographic linear motor, lithographic apparatus, and device manufacturing method | Sven Antoin Johan Hol, Johan Cornelis Compter, Erik Roelof Loopstra | 2006-08-22 |
| 7088428 | Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method | Sven Antoin Johan Hol, Edwin Johan Buis, Harmen Klaas Van Der Schoot | 2006-08-08 |
| 7079226 | Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method | Sven Antoin Johan Hol, Henrikus Herman Marie Cox | 2006-07-18 |
| 7005823 | Positioning system and positioning method | Martijn Houkes, Henrikus Herman Marie Cox, Ramidin Izair Kamidin | 2006-02-28 |