| 10747127 |
Lithographic apparatus |
Frits Van Der Meulen, Erik Johan Arlemark, Hendrikus Herman Marie Cox, Martinus Agnes Willem Cuijpers, Joost DE HOOGH +17 more |
2020-08-18 |
| 10481510 |
Graphene spectral purity filter |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Lucas Henricus Johannes Stevens, Maarten Van Kampen |
2019-11-19 |
| 10007197 |
Sensor system, substrate handling system and lithographic apparatus |
Joeri Lof, Joost Kauffman, Martin Dieter Nico Peters, Petrus Theodorus Rutgers, Martijn Hendrikus Wilhelmus Stopel +2 more |
2018-06-26 |
| 9989844 |
Pellicle for reticle and multilayer mirror |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Lucas Henricus Johannes Stevens, Maarten Van Kampen |
2018-06-05 |
| 9494869 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Arno Jan Bleeker, Pieter Renaat Maria Hennus, Martinus Hendricus Hoeks, Sven Antoin Johan Hol +9 more |
2016-11-15 |
| 9482960 |
Pellicle for reticle and multilayer mirror |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Lucas Henricus Johannes Stevens, Maarten Van Kampen |
2016-11-01 |
| 9395630 |
Lithographic apparatus and method |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Lucas Henricus Johannes Stevens, Maarten Van Kampen |
2016-07-19 |
| 8781775 |
Lithographic apparatus and method for correcting a position of a stage of a lithographic apparatus |
Hans Butler, Emiel Jozef Melanie Eussen, Willem Herman Gertruda Anna Koenen, Engelbertus Antonius Fransiscus Van Der Pasch, Marc Wilhelmus Maria Van Der Wijst +2 more |
2014-07-15 |
| 8411252 |
Lithographic apparatus and device manufacturing method utilizing a substrate handler |
Hernes Jacobs, Bernardus Antonius Johannes Luttikhuis, Petrus Matthijs Henricus Vosters |
2013-04-02 |
| 8264670 |
Lithographic apparatus and device manufacturing method for clamping a patterning device |
Erik Roelof Loopstra, Bernardus Antonius Johannes Luttikhuis, Fransicus Mathijs Jacobs |
2012-09-11 |
| 8174680 |
Substrate handler, lithographic apparatus and device manufacturing method |
Hernes Jacobs, Bernardus Antonius Johannes Luttikhuis, Petrus Matthijs Henricus Vosters, Johannes Martinus Andreas Hazenberg, Aart Adrianus Van Beuzekom |
2012-05-08 |
| 7760324 |
Lithographic apparatus and device manufacturing method |
Jozef Petrus Henricus Benschop, Hans Butler, Nicolaas Rudolf Kemper, Bartholomeus Hendricus Koek, Frits Van Der Meulen |
2010-07-20 |
| 7679720 |
Apparatus configured to position a workpiece |
Michel Pieter Dansberg, Sebastiaan Maria Johannes Cornelissen, Henrikus Herman Marie Cox, Robert Johannes Petrus Van Diesen, Nicolaas Rudolf Kemper +2 more |
2010-03-16 |
| 7667822 |
Lithographic apparatus and stage apparatus |
Fransicus Mathijs Jacobs, Erik Roelof Loopstra, Arjan Franklin Bakker, Arjan Martin Van Der Wel, Krijn Frederik Bustraan +1 more |
2010-02-23 |
| 7656506 |
Lithographic apparatus and device manufacturing method utilizing a substrate handler |
Hernes Jacobs, Bernardus Antonius Johannes Luttikhuis, Petrus Matthijs Henricus Vosters |
2010-02-02 |
| 7595496 |
Optimized correction of wafer thermal deformations in a lithographic process |
Joost Jeroen Ottens, Jeroen Pieter Starreveld, Wouterus Johannes Petrus Maria Maas, Willem Jurrianus Venema, Boris Menchtchikov |
2009-09-29 |
| 7576835 |
Substrate handler, lithographic apparatus and device manufacturing method |
Hernes Jacobs, Bernardus Antonius Johannes Luttikhuis, Petrus Matthijs Henricus Vosters, Johannes Martinus Andreas Hazenberg, Aart Adrianus Van Beuzekom |
2009-08-18 |
| 7538857 |
Lithographic apparatus and device manufacturing method utilizing a substrate handler |
Hernes Jacobs, Petrus Matthijs Henricus Vosters, Bernardus Antonius Johannes Luttikhuis |
2009-05-26 |
| 7492440 |
Lithographic apparatus and device manufacturing method |
Koen Jacobus Johannes Maria Zaal, Edwin Johan Buis, Henrikus Herman Marie Cox, Noud Jan Gilissen |
2009-02-17 |
| 7483120 |
Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method |
Bernardus Antonius Johannes Luttikhuis, Henrikus Herman Marie Cox, Erik Roelof Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch |
2009-01-27 |
| 7440081 |
Lithographic apparatus, device manufacturing method, and substrate table |
Cheng-Qun Gui |
2008-10-21 |
| 7408617 |
Lithographic apparatus and device manufacturing method utilizing a large area FPD chuck equipped with encoders an encoder scale calibration method |
Engelbertus Antonius Fransiscus Van Der Pasch |
2008-08-05 |
| 7359032 |
Lithographic apparatus and device manufacturing method |
Michel Pieter Dansberg, Sebastiaan Maria Johannes Cornelissen, Henrikus Herman Marie Cox, Robert Johannes Petrus Van Diesen, Nicolaas Rudolf Kemper +2 more |
2008-04-15 |
| 7352438 |
Lithographic apparatus and device manufacturing method |
Bernardus Antonius Johannes Luttikhuis, Erik Roelof Loopsta, Fransicus Mathijs Jacobs |
2008-04-01 |
| RE40043 |
Positioning device having two object holders |
Yim-Bun Patrick Kwan, Gerrit Maarten Bonnema, Erik Roelof Loopstra, Gerjan P. Veldhuis |
2008-02-05 |