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Lithographic apparatus and device manufacturing method |
Hans Butler, Maurice Willem Jozef Etiënne Wijckmans, Engelbertus Antonius Fransiscus Van Der Pasch, Christiaan Alexander Hoogendam |
2019-02-19 |
| 9513566 |
Lithographic apparatus |
Kursat Bal, David Christopher Ockwell, Arnold Jan Van Putten, Han-Kwang Nienhuys, Maikel Bernardus Theodorus Leenders |
2016-12-06 |
| 8636458 |
Integrated post-exposure bake track |
Suzan Leonie Auer-Jongepier, Johannes Onvlee, Petrus Rutgerus Bartray, Reinder Teun Plug, Hubert Marie Segers |
2014-01-28 |
| 8411252 |
Lithographic apparatus and device manufacturing method utilizing a substrate handler |
Hernes Jacobs, Harmen Klaas Van Der Schoot, Petrus Matthijs Henricus Vosters |
2013-04-02 |
| 8289498 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Petrus Rutgerus Bartray, Leon Martin Levasier, Josephus Jacobus Smits, Anthonie Aantjes +7 more |
2012-10-16 |
| 8264670 |
Lithographic apparatus and device manufacturing method for clamping a patterning device |
Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Fransicus Mathijs Jacobs |
2012-09-11 |
| 8174680 |
Substrate handler, lithographic apparatus and device manufacturing method |
Harmen Klaas Van Der Schoot, Hernes Jacobs, Petrus Matthijs Henricus Vosters, Johannes Martinus Andreas Hazenberg, Aart Adrianus Van Beuzekom |
2012-05-08 |
| 7961291 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra |
2011-06-14 |
| 7804584 |
Integrated circuit manufacturing methods with patterning device position determination |
Petrus Rutgerus Bartray, Wilhelmus Josephus Box, Dominicus Jacobus Petrus Adrianus Franken, Engelbertus Antonius Fransiscus Van Der Pasch, Marc Wilhelmus Maria Van Der Wijst +1 more |
2010-09-28 |
| 7724351 |
Lithographic apparatus, device manufacturing method and exchangeable optical element |
Erik Roelof Loopstra, Adrianus Franciscus Petrus Engelen, Maria Johanna Agnes Rubingh, Johannes Martinus Andreas Hazenberg, Laurentius Catrinus Jorritsma +7 more |
2010-05-25 |
| 7656506 |
Lithographic apparatus and device manufacturing method utilizing a substrate handler |
Hernes Jacobs, Harmen Klaas Van Der Schoot, Petrus Matthijs Henricus Vosters |
2010-02-02 |
| 7576835 |
Substrate handler, lithographic apparatus and device manufacturing method |
Harmen Klaas Van Der Schoot, Hernes Jacobs, Petrus Matthijs Henricus Vosters, Johannes Martinus Andreas Hazenberg, Aart Adrianus Van Beuzekom |
2009-08-18 |
| 7545478 |
Lithographic apparatus, thermal conditioning system, and method for manufacturing a device |
Wilhelmus Josephus Box, Thomas Henricus Jacobus Verhagen |
2009-06-09 |
| 7538857 |
Lithographic apparatus and device manufacturing method utilizing a substrate handler |
Hernes Jacobs, Harmen Klaas Van Der Schoot, Petrus Matthijs Henricus Vosters |
2009-05-26 |
| 7522258 |
Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contamination |
Petrus Rutgerus Bartray, Wilhelmus Josephus Box, Marco Koert Stavenga, Thijs Harink |
2009-04-21 |
| 7483120 |
Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method |
Henrikus Herman Marie Cox, Erik Roelof Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch, Harmen Klaas Van Der Schoot |
2009-01-27 |
| 7471373 |
Lithographic apparatus with patterning device position determination |
Petrus Rutgerus Bartray, Wilhelmus Josephus Box, Dominicus Jacobus Petrus Adrianus Franken, Engelbertus Antonius Fransiscus Van Der Pasch, Marc Wilhelmus Maria Van Der Wijst +1 more |
2008-12-30 |
| 7375795 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Joeri Lof, Jeroen Fluit, Peter Spit |
2008-05-20 |
| 7352438 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopsta, Harmen Klaas Van Der Schoot, Fransicus Mathijs Jacobs |
2008-04-01 |
| 7256867 |
Lithographic apparatus and device manufacturing method |
Harmen Klaas Van Der Schoot, Petrus Matthijs Henricus Vosters |
2007-08-14 |
| 7253875 |
Lithographic apparatus and device manufacturing method |
Engelbertus Antonius Fransiscus Van Der Pasch, Ronald Van Der Ham, Niek Jacobus Johannes Roset |
2007-08-07 |
| 7130019 |
Lithographic apparatus and device manufacturing method |
Petrus Rutgerus Bartray, Wilhelmus Josephus Box, Carlo Cornelis Maria Luijten, Michael Ten Bhomer, Ferdy Migchelbrink +1 more |
2006-10-31 |
| 7126664 |
Lithographic apparatus and a device manufacturing method |
Petrus Rutgerus Bartray, Johannes Henricus Wilhelmus Jacobs, Thijs Harink, Paulus Martinus Maria Liebregts |
2006-10-24 |
| 7061579 |
Lithographic apparatus and device manufacturing method |
Pertrus Bartray, Wilhelmus Josephus Box, Michael Ten Bhomer |
2006-06-13 |
| 6977713 |
Lithographic apparatus and device manufacturing method |
Pertrus Bartray, Wilhelmus Josephus Box, Martinus Hendrikus Antonius Leenders, Marc Wilhelmus Maria Van Der Wijst |
2005-12-20 |