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Integrated post-exposure bake track |
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Metrology method and apparatus, lithographic apparatus, device manufacturing method and substrate |
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2013-04-02 |
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Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate |
Arie Jeffrey Den Boef, Karel Diederick Van Der Mast |
2011-06-14 |
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Lithographic apparatus, combination of lithographic apparatus and processing module, and device manufacturing method |
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Apparatus for angular-resolved spectroscopic lithography characterization and device manufacturing method |
Martinus Joseph Kok, Sander Kerssemakers |
2010-02-09 |
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Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate |
Arie Jeffrey Den Boef, Karel Diederick Van Der Mast |
2009-09-08 |
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Lithography system, control system and device manufacturing method |
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2009-03-31 |
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Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate |
Arie Jeffrey Den Boef, Karel Diederick Van Der Mast |
2009-03-10 |
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Lithographic system, sensor, and method of measuring properties of a substrate |
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2009-01-20 |
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Lithography system, control system and device manufacturing method |
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2008-04-01 |
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Method, apparatus and computer product for substrate processing |
— |
2006-09-26 |
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Servo control method and its application in a lithographic apparatus |
Harry H. H. M. Cox |
2002-07-16 |