Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183543 | Multi-modal operations for multi-beam inspection system | — | 2024-12-31 |
| 12165837 | System and method for scanning a sample using multi-beam inspection apparatus | Joost Jeroen Ottens, Long Ma, Youfei Jiang, Weihua Yin, Wei Li +1 more | 2024-12-10 |
| 11854765 | Multiple charged-particle beam apparatus and methods | Weiming Ren, Xuedong Liu, Xuerang Hu, Zhong-Wei Chen | 2023-12-26 |
| 11798777 | Charged particle beam apparatus, and systems and methods for operating the apparatus | Peter Paul HEMPENIUS, Weiming Ren, Zhongwei Chen | 2023-10-24 |
| 11049689 | Systems and methods for charged particle beam modulation | Ehud Shaked | 2021-06-29 |
| 10884342 | Method and apparatus for predicting performance of a metrology system | Reinder Teun Plug, Kaustuve Bhattacharyya | 2021-01-05 |
| 10416567 | Illumination system and metrology system | Johannes Matheus Marie De Wit, Kim Gerard Feijen, Anko Jozef Cornelus Sijben, Henricus Martinus Johannes Van De Groes | 2019-09-17 |
| 10403471 | Systems and methods for charged particle beam modulation | Ehud Shaked | 2019-09-03 |