Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10416567 | Illumination system and metrology system | Johannes Matheus Marie De Wit, Anko Jozef Cornelus Sijben, Martinus Gerardus Johannes Maria MAASSEN, Henricus Martinus Johannes Van De Groes | 2019-09-17 |
| 10101677 | Inspection apparatus for measuring properties of a target structure, methods of operating an optical system, method of manufacturing devices | Henricus Wilhelmus Maria Van Buel, Martinus Joseph Kok | 2018-10-16 |