Issued Patents All Time
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429328 | Metrology method, target and substrate | Kaustuve Bhattacharyya, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar, Arie Jeffrey Den Boef +7 more | 2025-09-30 |
| 12276921 | Substrate comprising a target arrangement, and associated at least one patterning device, lithographic method and metrology method | Olger Victor Zwier, Maurits Van Der Schaar, Hilko Dirk Bos, Hans Van Der Laan, S. M. Masudur Rahman Al Arif +6 more | 2025-04-15 |
| 11428521 | Metrology method, target and substrate | Kaustuve Bhattacharyya, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar, Arie Jeffrey Den Boef +7 more | 2022-08-30 |
| 11204239 | Metrology method, target and substrate | Kaustuve Bhattacharyya, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar, Arie Jeffrey Den Boef +7 more | 2021-12-21 |
| 11123773 | Apparatus for and a method of removing contaminant particles from a component of an apparatus | Tim Peter Johan Gerard Maas, Bartolomeus Martinus Johannes Van Hout, Floris Zoethout | 2021-09-21 |
| 10718604 | Metrology method, target and substrate | Kaustuve Bhattacharyya, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar, Arie Jeffrey Den Boef +7 more | 2020-07-21 |
| 10386176 | Metrology method, target and substrate | Kaustuve Bhattacharyya, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar, Arie Jeffrey Den Boef +7 more | 2019-08-20 |
| 10331043 | Optimization of target arrangement and associated target | Johannes Marcus Maria Beltman, Xing Lan Liu, Hendrik Jan Hidde Smilde, Richard Johannes Franciscus Van Haren | 2019-06-25 |
| 10162272 | Metrology method and apparatus, substrates for use in such methods, lithographic system and device manufacturing method | Martin Jacobus Johan Jak, Hendrik Jan Hidde Smilde, Te-Chih Huang, Victor Emanuel Calado, Richard Johannes Franciscus Van Haren | 2018-12-25 |
| 10101677 | Inspection apparatus for measuring properties of a target structure, methods of operating an optical system, method of manufacturing devices | Kim Gerard Feijen, Martinus Joseph Kok | 2018-10-16 |
| 8576374 | Lithographic apparatus and method | Keith Frank Best, Cheng-Qun Gui, Johannes Onvlee, Rudy Jan Maria Pellens, Remi Daniel Marie Edart +2 more | 2013-11-05 |
| 8395772 | Sensor, a table and lithographic apparatus | Jeroen Thomas Broekhuijse, Vitaliy Prosyentsov, Sandra Van Der Graaf, Nina Vladimirovna Dziomkina | 2013-03-12 |
| 7751047 | Alignment and alignment marks | Fransiscus Godefridus Casper Bijnen | 2010-07-06 |
| 7675606 | Lithographic apparatus and method | Enno Van Den Brink, Joseph Consolini, Gerardus Johannes Joseph Keijsers, Klaus Simon, Johannes Theodoor De Smit +6 more | 2010-03-09 |
| 7562686 | Method and system for 3D alignment in wafer scale integration | Keith Frank Best, Geoffrey Norman Phillipps, Franciscus Godefridus Casper Bijnen, Enno Van Den Brink, Joseph Consolini +1 more | 2009-07-21 |
| 7563562 | Lithographic apparatus and device manufacturing method | — | 2009-07-21 |
| 7480028 | Lithographic apparatus for imaging a front side or a back side of a substrate, method of substrate identification, device manufacturing method, substrate, and computer program | Michael Van Der Veen, Anastasius Jacobus Anicetus Bruinsma, Jacob Klinkhamer, Martinus Hendrikus Antonius Leenders, Christianus Gerardus Maria De Mol +1 more | 2009-01-20 |
| 7463337 | Substrate table with windows, method of measuring a position of a substrate and a lithographic apparatus | Franciscus Godefridus Casper Bijnen | 2008-12-09 |
| 7420676 | Alignment method, method of measuring front to backside alignment error, method of detecting non-orthogonality, method of calibration, and lithographic apparatus | Joeri Lof, Fransiscus Godefridus Casper Bijnen, Gerardus Johannes Joseph Keijsers, Robertus Victorius Maria Scheepens | 2008-09-02 |
| 7349071 | Pre-aligning a substrate in a lithographic apparatus, device manufacturing method, and device manufactured by the manufacturing method | Peter Ten Berge, Marcus Theodoor Wilhelmus Van Der Heijden | 2008-03-25 |
| 7342642 | Pre-aligning a substrate in a lithographic apparatus, device manufacturing method, and device manufactured by the manufacturing method | Peter Ten Berge, Markus Theodoor Wilhelmus Van Der Heijden | 2008-03-11 |
| 7253884 | Method of calibrating a lithographic apparatus, alignment method, computer program, data storage medium, lithographic apparatus, and device manufacturing method | Cheng-Qun Gui, Alex De Vries | 2007-08-07 |
| 7251018 | Substrate table, method of measuring a position of a substrate and a lithographic apparatus | — | 2007-07-31 |
| 7239393 | Calibration method for a lithographic apparatus and device manufacturing method | Arno Jan Bleeker, Joeri Lof | 2007-07-03 |
| 7193231 | Alignment tool, a lithographic apparatus, an alignment method, a device manufacturing method and device manufactured thereby | Joeri Lof, Fransiscus Godefridus Casper Bijnen, Cheng-Qun Gui | 2007-03-20 |