Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7253884 | Method of calibrating a lithographic apparatus, alignment method, computer program, data storage medium, lithographic apparatus, and device manufacturing method | Henricus Wilhelmus Maria Van Buel, Cheng-Qun Gui | 2007-08-07 |
| 7244534 | Device manufacturing method | — | 2007-07-17 |
| 7102748 | Lithographic apparatus, device manufacturing method, and computer program | — | 2006-09-05 |