| 9383195 |
Lithographic apparatus and method |
Wilhelmus Johannes Maria De Laat, Peter Theodorus Maria Giesen, Marcus Theodoor Wilhelmus Van Der Heijden, Erwin Rinaldo Meinders, Mária Péter |
2016-07-05 |
| 9335638 |
Lithographic apparatus, programmable patterning device and lithographic method |
Pieter Willem Herman De Jager, Vadim Yevgenyevich Banine, Jozef Petrus Henricus Benschop, Johannes Onvlee, Erwin John Van Zwet |
2016-05-10 |
| 8982318 |
Lithographic apparatus and method |
Nikolay Nikolaevich Iosad |
2015-03-17 |
| RE45284 |
Lithographic apparatus and device manufacturing method |
— |
2014-12-09 |
| 8675175 |
Lithographic apparatus and device manufacturing method |
Richard Alexander George, Pieter Willem Herman De Jager, Robbert Edgar Van Leeuwen, Jacobus Burghoorn |
2014-03-18 |
| 8576374 |
Lithographic apparatus and method |
Keith Frank Best, Henricus Wilhelmus Maria Van Buel, Johannes Onvlee, Rudy Jan Maria Pellens, Remi Daniel Marie Edart +2 more |
2013-11-05 |
| 8531648 |
Lithographic apparatus, programmable patterning device and lithographic method |
Pieter Willem Herman De Jager, Vadim Yevgenyevich Banine, Jozef Petrus Henricus Benschop, Johannes Onvlee, Erwin John Van Zwet |
2013-09-10 |
| 8502954 |
Lithographic apparatus and device manufacturing method |
Gustaaf Willem Van Der Feltz, Johan Christiaan Gerard Hoefnagels |
2013-08-06 |
| 8395755 |
Lithographic apparatus and device manufacturing method |
Richard Alexander George, Pieter Willem Herman De Jager, Robbert Edgar Van Leeuwen, Jacobus Burghoorn |
2013-03-12 |
| 8390787 |
Lithographic apparatus and device manufacturing method |
Pieter Willem Herman De Jager, Robert-Han Munning Schmidt |
2013-03-05 |
| 8383325 |
Lithographic apparatus and method |
Nikolay Nikolaevich Iosad |
2013-02-26 |
| RE43515 |
Lithographic apparatus and device manufacturing method |
— |
2012-07-17 |
| 8029973 |
Lithographic method and carrier substrate |
Wilhelmus Johannes Maria De Laat, Peter Theodorus Maria Giesen, Paulus Wilhelmus Leonardus Van Dijk, Erwin Rinaldo Meinders, Mária Péter |
2011-10-04 |
| 7911586 |
Lithographic apparatus and device manufacturing method |
Arno Jan Bleeker, Pieter Willem Herman De Jager |
2011-03-22 |
| 7879514 |
Lithographic method and patterning device |
Geoffrey Norman Phillipps, Rudy Jan Maria Pellens, Paulus Wilhelmus Leonardus Van Dijk |
2011-02-01 |
| 7684009 |
Lithographic apparatus and device manufacturing method |
Pieter Willem Herman De Jager, Peter Spit, Eduard Hoeberichts |
2010-03-23 |
| 7643128 |
Large field of view projection optical system with aberration correctability |
Robert D. Harned, Pieter Willem Herman De Jager |
2010-01-05 |
| 7609362 |
Scanning lithographic apparatus and device manufacturing method |
Pieter Willem Herman De Jager, Jacob Klinkhamer, Eduard Hoeberichts |
2009-10-27 |
| 7576834 |
Lithographic apparatus and device manufacturing method |
Richard Alexander George, Pieter Willem Herman De Jager, Robbert Edgar Van Leeuwen, Jacobus Burghoorn |
2009-08-18 |
| 7567340 |
Lithographic apparatus and device manufacturing method |
Keith Frank Best, Enno Van Den Brink, Budiman Sutedja, Peter Berge |
2009-07-28 |
| 7561251 |
Lithographic apparatus and device manufacturing method |
Gustaaf Willem Van Der Feltz, Johan Christiaan Gerard Hoefnagels |
2009-07-14 |
| 7531040 |
Resist recovery method |
Joseph Consolini, Keith Frank Best, Alexander Friz |
2009-05-12 |
| 7522266 |
Lithographic apparatus and device manufacturing method |
Arno Jan Bleeker, Pieter Willem Herman De Jager |
2009-04-21 |
| 7477403 |
Optical position assessment apparatus and method |
Fransiscus Godefridus Casper Bijnen, Johan Christiaan Gerard Hoefnagels, Pieter Willem Herman De Jager, Joannes Theodoor De Smit |
2009-01-13 |
| 7468291 |
Method and apparatus for locating and/or forming bumps |
David Christopher Ockwell, Gabriel N. M. M. van der Voort |
2008-12-23 |