Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7440081 | Lithographic apparatus, device manufacturing method, and substrate table | Harmen Klaas Van Der Schoot | 2008-10-21 |
| 7428040 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker, Pieter Willem Herman De Jager, Joost Sytsma | 2008-09-23 |
| 7426076 | Projection system for a lithographic apparatus | Pieter Willem Herman De Jager, Robert D. Harned, Nora-Jean Harned | 2008-09-16 |
| 7405802 | Large field of view 2X magnification projection optical system for FPD manufacture | Robert D. Harned, Lev Sakin, Patrick de Jager, Irina I. Pozhinskaya, Noreen Harned | 2008-07-29 |
| 7388663 | Optical position assessment apparatus and method | — | 2008-06-17 |
| 7385675 | Lithographic apparatus and device manufacturing method | Richard Alexander George, Pieter Willem Herman De Jager, Robbert Edgar Van Leeuwen, Jacobus Burghoom | 2008-06-10 |
| 7333177 | Lithographic apparatus and device manufacturing method | — | 2008-02-19 |
| 7324186 | Lithographic apparatus and device manufacturing method | Pieter Willem Herman De Jager | 2008-01-29 |
| 7256865 | Methods and apparatuses for applying wafer-alignment marks | Joseph Consolini, Keith Frank Best, Alexander Friz | 2007-08-14 |
| 7253884 | Method of calibrating a lithographic apparatus, alignment method, computer program, data storage medium, lithographic apparatus, and device manufacturing method | Henricus Wilhelmus Maria Van Buel, Alex De Vries | 2007-08-07 |
| 7251020 | Lithographic apparatus and device manufacturing method | — | 2007-07-31 |
| 7202939 | Lithographic apparatus and device manufacturing method | Pieter Willem Herman De Jager, Robert-Han Munnig Schmidt | 2007-04-10 |
| 7193231 | Alignment tool, a lithographic apparatus, an alignment method, a device manufacturing method and device manufactured thereby | Joeri Lof, Fransiscus Godefridus Casper Bijnen, Henricus Wilhelmus Maria Van Buel | 2007-03-20 |
| 7190434 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker, Pieter Willem Herman De Jager, Joost Sytsma | 2007-03-13 |
| 7184124 | Lithographic apparatus having an adjustable projection system and device manufacturing method | Robert D. Harned, Nora-Jean Harned | 2007-02-27 |
| 7158215 | Large field of view protection optical system with aberration correctability for flat panel displays | Robert D. Harned, Patrick de Jager | 2007-01-02 |
| 7158208 | Lithographic apparatus and device manufacturing method | Pieter Willem Herman De Jager, Peter Spit, Eduard Hoeberichts | 2007-01-02 |
| 7133118 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker, Pieter Willem Herman De Jager | 2006-11-07 |
| 7116402 | Lithographic apparatus and device manufacturing method | — | 2006-10-03 |
| 7084955 | Lithographic apparatus | Henricus Wilhelmus Maria Van Buel, Maurits Van Der Schaar, Arie Jeffrey Den Boef | 2006-08-01 |
| 7081947 | Lithographic apparatus and device manufacturing method | Pieter Willem Herman De Jager | 2006-07-25 |
| 7064807 | Lithographic apparatus | Henricus Wilhelmus Maria Van Buel, Maurits Van Der Schaar, Arie Jeffrey Den Boef | 2006-06-20 |
| 6967711 | Lithographic apparatus and device manufacturing method | — | 2005-11-22 |
| 6936385 | Calibration methods, calibration substrates, lithographic apparatus and device manufacturing methods | Joeri Lof, Henricus Wilhelmus Maria Van Buel, Fransiscus Godefridus Casper Bijnen | 2005-08-30 |
| 6914664 | Lithographic apparatus, alignment method and device manufacturing method | Keith Frank Best, Alexander Friz, Joseph Consolini, Henricus Wilhelmus Maria Van Buel | 2005-07-05 |