Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8107173 | Catadioptric optical system for scatterometry | Yevgeniy Konstanitinovich Shmarev, Stanislav Smirnov | 2012-01-31 |
| 7633689 | Catadioptric optical system for scatterometry | Yevgeniy Konstantinovich Shmarev, Stanislav Smirnov | 2009-12-15 |
| 7405802 | Large field of view 2X magnification projection optical system for FPD manufacture | Robert D. Harned, Lev Sakin, Patrick de Jager, Cheng-Qun Gui, Noreen Harned | 2008-07-29 |