| 8168017 |
Bonding silicon silicon carbide to glass ceramics |
Matthew Lipson, Geoffrey O'Connor, Timothy O'Neil |
2012-05-01 |
| 7826142 |
Method for improved optical design using deterministically defined surfaces |
Nora-Jean Harned, Richard Gontin, Azat Latypov, Stanislav Smirnov |
2010-11-02 |
| 7678458 |
Bonding silicon silicon carbide to glass ceramics |
Matthew Lipson, Geoffrey O'Connor, Timothy O'Neil |
2010-03-16 |
| 7643128 |
Large field of view projection optical system with aberration correctability |
Cheng-Qun Gui, Pieter Willem Herman De Jager |
2010-01-05 |
| 7443514 |
Diffractive null corrector employing a spatial light modulator |
Nora-Jean Harned |
2008-10-28 |
| 7426076 |
Projection system for a lithographic apparatus |
Cheng-Qun Gui, Pieter Willem Herman De Jager, Nora-Jean Harned |
2008-09-16 |
| 7420722 |
Multiple illumination source exposure apparatus |
Noreen Harned |
2008-09-02 |
| 7405802 |
Large field of view 2X magnification projection optical system for FPD manufacture |
Lev Sakin, Patrick de Jager, Cheng-Qun Gui, Irina I. Pozhinskaya, Noreen Harned |
2008-07-29 |
| 7342701 |
Multiple illumination source exposure apparatus |
Noreen Harned |
2008-03-11 |
| 7224469 |
Optical system alignment system and method with high accuracy and simple operation |
Nora-Jean Harned |
2007-05-29 |
| 7184124 |
Lithographic apparatus having an adjustable projection system and device manufacturing method |
Cheng-Qun Gui, Nora-Jean Harned |
2007-02-27 |
| 7158215 |
Large field of view protection optical system with aberration correctability for flat panel displays |
Patrick de Jager, Cheng-Qun Gui |
2007-01-02 |