Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE49066 | Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus | Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Michael L. Nelson, Jacobus Cornelis Gerardus Van Der Sanden, Michael Andrew Chieda +1 more | 2022-05-10 |
| 10324383 | Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus | Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Michael L. Nelson, Jacobus Cornelius Gerardus Van Der Sanden, Michael Andrew Chieda +1 more | 2019-06-18 |
| 8168017 | Bonding silicon silicon carbide to glass ceramics | Matthew Lipson, Robert D. Harned, Timothy O'Neil | 2012-05-01 |
| 7678458 | Bonding silicon silicon carbide to glass ceramics | Matthew Lipson, Robert D. Harned, Timothy O'Neil | 2010-03-16 |
| 5285142 | Wafer stage with reference surface | Daniel N. Galburt | 1994-02-08 |
| 4760429 | High speed reticle change system | — | 1988-07-26 |