Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11500298 | Reticle sub-field thermal control | Eric Justin MONKMAN, Stephen Roux, Victor Antonio PEREZ-FALCON | 2022-11-15 |
| RE49066 | Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus | Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Michael L. Nelson, Jacobus Cornelis Gerardus Van Der Sanden, Geoffrey O'Connor +1 more | 2022-05-10 |
| 11048175 | Apparatus for and method cleaning a support inside a lithography apparatus | Victor Antonio PEREZ-FALCON | 2021-06-29 |
| 10324383 | Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus | Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Michael L. Nelson, Jacobus Cornelius Gerardus Van Der Sanden, Geoffrey O'Connor +1 more | 2019-06-18 |