Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8623576 | Time differential reticle inspection | Eric Brian Catey, Yevgeniy Konstantinovich Shmarev, Robert Albert Tharaldsen, Richard David Jacobs | 2014-01-07 |
| 7826142 | Method for improved optical design using deterministically defined surfaces | Richard Gontin, Robert D. Harned, Azat Latypov, Stanislav Smirnov | 2010-11-02 |
| 7443514 | Diffractive null corrector employing a spatial light modulator | Robert D. Harned | 2008-10-28 |
| 7426076 | Projection system for a lithographic apparatus | Cheng-Qun Gui, Pieter Willem Herman De Jager, Robert D. Harned | 2008-09-16 |
| 7224469 | Optical system alignment system and method with high accuracy and simple operation | Robert D. Harned | 2007-05-29 |
| 7184124 | Lithographic apparatus having an adjustable projection system and device manufacturing method | Robert D. Harned, Cheng-Qun Gui | 2007-02-27 |