Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12140872 | Optical designs of miniaturized overlay measurement system | Mohamed Swillam, Tamer Elazhary, Stephen Roux | 2024-11-12 |
| 11126007 | Beam splitting prism systems | Douglas C. CAPPELLI, Stanislav Smirnov, Richard Carl Zimmerman, Joshua Adams, Alexander K. Raub | 2021-09-21 |
| 10866526 | Metrology method and device | Nitesh Pandey, Armand Eugene Albert Koolen | 2020-12-15 |
| 10754259 | Method and device for pupil illumination in overlay and critical dimension sensors | Markus Franciscus Antonius Eurlings | 2020-08-25 |
| 10747010 | Beam splitting prism systems | Douglas C. CAPPELLI, Stanislav Smirnov, Richard Carl Zimmerman, Joshua Adams, Alexander K. Raub | 2020-08-18 |
| 10724961 | Method and device for focusing in an inspection system | Stanislav Smirnov | 2020-07-28 |
| 10107761 | Method and device for focusing in an inspection system | Stanislav Smirnov, Chien-Hung Tseng, Armand Eugene Albert Koolen | 2018-10-23 |
| 10048591 | Catadioptric illumination system for metrology | Stanislav Smirnov | 2018-08-14 |
| 9904173 | Method and apparatuses for optical pupil symmetrization | Stanislav Smirnov | 2018-02-27 |
| 9285687 | Inspection apparatus, lithographic apparatus, and device manufacturing method | Stanislav Smirnov, Lev Ryzhikov, Eric Brian Catey, Adel Joobeur, David Heald +1 more | 2016-03-15 |
| 9069260 | Catadioptric illumination system for metrology | Stanislav Smirnov | 2015-06-30 |
| 9046754 | EUV mask inspection system | Harry Sewell, Eric Brian Catey, Adel Joobeur | 2015-06-02 |
| 8982481 | Catadioptric objective for scatterometry | Stanislav Smirnov, Adel Joobeur, Arun Mahadevan Venkataraman | 2015-03-17 |
| 8934084 | System and method for printing interference patterns having a pitch in a lithography system | — | 2015-01-13 |
| 8623576 | Time differential reticle inspection | Eric Brian Catey, Nora-Jean Harned, Robert Albert Tharaldsen, Richard David Jacobs | 2014-01-07 |
| 8189203 | Reticle inspection systems and method | Eric Brian Catey, Robert Albert Tharaldsen, Richard David Jacobs | 2012-05-29 |
| 8164740 | Illumination system coherence remover with two sets of stepped mirrors | Huibert Visser, Jacob Klinkhamer, Lev Ryzhikov, Scott Coston, Adel Joobeur +1 more | 2012-04-24 |
| 8159651 | Illumination system coherence remover with a series of partially reflective surfaces | Huibert Visser, Jacob Klinkhamer, Lev Ryzhikov, Scott Coston, Adel Joobeur +1 more | 2012-04-17 |
| 8120001 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Arie Jeffrey Den Boef | 2012-02-21 |
| 7633689 | Catadioptric optical system for scatterometry | Stanislav Smirnov, Irina I. Pozhinskaya | 2009-12-15 |
| 7630136 | Optical integrators for lithography systems and methods | Lev Ryzhikov, Abel Joobeur | 2009-12-08 |
| 7589832 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device method | Arie Jeffrey Den Boef | 2009-09-15 |