Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7630136 | Optical integrators for lithography systems and methods | Lev Ryzhikov, Yevgeniy Konstantinovich Shmarev | 2009-12-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7630136 | Optical integrators for lithography systems and methods | Lev Ryzhikov, Yevgeniy Konstantinovich Shmarev | 2009-12-08 |