Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11906907 | Apparatus and method for determining a condition associated with a pellicle | Derk Servatius Gertruda Brouns, Joshua Adams, Aage Bendiksen, Andrew Judge, Veera Venkata Narasimha Narendra Phani KOTTAPALLI +5 more | 2024-02-20 |
| 9285687 | Inspection apparatus, lithographic apparatus, and device manufacturing method | Stanislav Smirnov, Lev Ryzhikov, Eric Brian Catey, Adel Joobeur, David Heald +1 more | 2016-03-15 |
| 8623576 | Time differential reticle inspection | Eric Brian Catey, Nora-Jean Harned, Yevgeniy Konstantinovich Shmarev, Robert Albert Tharaldsen | 2014-01-07 |
| 8189203 | Reticle inspection systems and method | Yevgeniy Konstantinovich Shmarev, Eric Brian Catey, Robert Albert Tharaldsen | 2012-05-29 |