Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9594030 | Lithographic apparatus and device manufacturing method | Yuli Vladimirsky | 2017-03-14 |
| 8681313 | Diffraction elements for alignment targets | Yuli Vladimirsky, Muhammad Arif | 2014-03-25 |
| 8623576 | Time differential reticle inspection | Eric Brian Catey, Nora-Jean Harned, Yevgeniy Konstantinovich Shmarev, Richard David Jacobs | 2014-01-07 |
| 8189203 | Reticle inspection systems and method | Yevgeniy Konstantinovich Shmarev, Eric Brian Catey, Richard David Jacobs | 2012-05-29 |