Issued Patents All Time
Showing 1–25 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12366811 | Metrology system and method for determining a characteristic of one or more structures on a substrate | Patricius Aloysius Jacobus Tinnemans, Arie Jeffrey Den Boef, Armand Eugene Albert Koolen, Vasco Tomas Tenner, Willem Marie Julia Marcel Coene +1 more | 2025-07-22 |
| 12339588 | High force low voltage piezoelectric micromirror actuator | Luc Haspeslagh, Ties Wouter VAN DER WOORD, Halil Gökay YEGEN, Guilherme Brondani Torri, Sebastianus Adrianus GOORDEN +3 more | 2025-06-24 |
| 12276784 | Micromirror arrays | Luc Haspeslagh, Veronique Rochus, Guilherme Brondani Torri, Sebastianus Adrianus GOORDEN | 2025-04-15 |
| 12259546 | Micromirror arrays | Alexandre Halbach, Sebastianus Adrianus GOORDEN, Veronique Rochus, Luc Haspeslagh, Guilherme Brondani Torri | 2025-03-25 |
| 12164233 | Metrology method and apparatus for of determining a complex-valued field | Alexander Prasetya KONIJNENBERG, Willem Marie Julia Marcel Coene | 2024-12-10 |
| 12158435 | Illumination and detection apparatus for a metrology apparatus | Simon Gijsbert Josephus Mathijssen, Kaustuve Bhattacharyya, Arie Jeffrey Den Boef | 2024-12-03 |
| 12117734 | Metrology method and device for determining a complex-valued field | Alexander Prasetya KONIJNENBERG | 2024-10-15 |
| 12086973 | Detection apparatus for simultaneous acquisition of multiple diverse images of an object | Teunis Willem Tukker, Arie Jeffrey Den Boef, Marinus Petrus REIJNDERS, Ferry Zijp | 2024-09-10 |
| 12007700 | Metrology system and method for determining a characteristic of one or more structures on a substrate | Patricius Aloysius Jacobus Tinnemans, Arie Jeffrey Den Boef, Armand Eugene Albert Koolen, Vasco Tomas Tenner, Willem Marie Julia Marcel Coene +1 more | 2024-06-11 |
| 11940739 | Metrology apparatus | Arie Jeffrey Den Boef, Duygu Akbulut, Marinus Johannes Maria Van Dam, Hans Butler, Hugo Augustinus Joseph Cramer +4 more | 2024-03-26 |
| 11927891 | Apparatus and methods for determining the position of a target structure on a substrate | Duygu Akbulut, Alessandro Polo, Sebastianus Adrianus GOORDEN | 2024-03-12 |
| 11782351 | Metrology device and detection apparatus therefor | — | 2023-10-10 |
| 11675276 | Metrology apparatus and photonic crystal fiber | — | 2023-06-13 |
| 11549806 | Metrology apparatus | Marinus Johannes Maria Van Dam, Arie Jeffrey Den Boef | 2023-01-10 |
| 11536654 | Scatterometer and method of scatterometry using acoustic radiation | Maxim PISARENCO, Alessandro Polo | 2022-12-27 |
| 11454887 | Metrology apparatus and method for determining a characteristic of one or more structures on a substrate | — | 2022-09-27 |
| 11415900 | Metrology system and method for determining a characteristic of one or more structures on a substrate | Patricius Aloysius Jacobus Tinnemans, Arie Jeffrey Den Boef, Armand Eugene Albert Koolen, Vasco Tomas Tenner, Willem Marie Julia Marcel Coene +1 more | 2022-08-16 |
| 11385553 | Metrology method, patterning device, apparatus and computer program | Zili Zhou, Olger Victor Zwier, Patrick Warnaar, Maurits Van Der Schaar, Elliott Gerard McNamara +6 more | 2022-07-12 |
| 11262661 | Metrology apparatus | Arie Jeffrey Den Boef, Duygu Akbulut, Marinus Johannes Maria Van Dam, Hans Butler, Hugo Augustinus Joseph Cramer +4 more | 2022-03-01 |
| 11086240 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Sebastianus Adrianus GOORDEN, Duygu Akbulut, Alessandro Polo, Simon Reinaid Huisman | 2021-08-10 |
| 10996571 | Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measured | Robert John Socha, Arie Jeffrey Den Boef | 2021-05-04 |
| 10996570 | Metrology method, patterning device, apparatus and computer program | Zili Zhou, Olger Victor Zwier, Patrick Warnaar, Maurits Van Der Schaar, Elliott Gerard McNamara +6 more | 2021-05-04 |
| 10983445 | Method and apparatus for measuring a parameter of interest using image plane detection techniques | Zili Zhou, Gerbrand Van Der Zouw, Arie Jeffrey Den Boef, Markus Gerardus Martinus Maria Van Kraaij, Armand Eugene Albert Koolen +7 more | 2021-04-20 |
| 10935373 | Topography measurement system | — | 2021-03-02 |
| 10908514 | Metrology apparatus, lithographic system, and method of measuring a structure | Janneke Ravensbergen, Duygu Akbulut, Jin LIAN | 2021-02-02 |