Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12346031 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Fei Liu, Zhuangxiong HUANG, Laurentius Cornelius De Winter, Frank Staals | 2025-07-01 |
| 12326669 | Illumination apparatus and associated metrology and lithographic apparatuses | Simon Reinald HUISMAN, Arjan Johannes Anton Beukman, Arie Jeffrey Den Boef, Sebastianus Adrianus GOORDEN, Nitish Kumar +1 more | 2025-06-10 |
| 12276921 | Substrate comprising a target arrangement, and associated at least one patterning device, lithographic method and metrology method | Olger Victor Zwier, Maurits Van Der Schaar, Hilko Dirk Bos, Hans Van Der Laan, S. M. Masudur Rahman Al Arif +6 more | 2025-04-15 |
| 11099489 | Method of measuring a parameter of a lithographic process, metrology apparatus | Hugo Augustinus Joseph Cramer, Hilko Dirk Bos, Erik Johan Koop, Armand Eugene Albert Koolen, Han-Kwang Nienhuys +2 more | 2021-08-24 |
| 11042100 | Measurement apparatus and method of measuring a target | Zili Zhou, Duygu Akbulut, Sergey Tarabrin | 2021-06-22 |
| 10908514 | Metrology apparatus, lithographic system, and method of measuring a structure | Janneke Ravensbergen, Duygu Akbulut, Nitesh Pandey | 2021-02-02 |
| 10831107 | Method for of measuring a parameter relating to a structure formed using a lithographic process | Sergei Sokolov | 2020-11-10 |
| 10788758 | Method of measuring a parameter of interest, device manufacturing method, metrology apparatus, and lithographic system | Nitesh Pandey | 2020-09-29 |
| 10705437 | Metrology method and apparatus, computer program and lithographic system | Narjes JAVAHERI, Mohammadreza Hajiahmadi, Murat Bozkurt, Alberto Da Costa Assafrao, Marc Johannes Noot +1 more | 2020-07-07 |
| 10656534 | Method of measuring, device manufacturing method, metrology apparatus, and lithographic system | Nitesh Pandey, SAMEE UR-REHMAN, Martin Jacobus Johan Jak | 2020-05-19 |
| 10444640 | Metrology apparatus, lithographic system, and method of measuring a structure | Janneke Ravensbergen, Duygu Akbulut, Nitesh Pandey | 2019-10-15 |
| 10310389 | Method of measuring, device manufacturing method, metrology apparatus, and lithographic system | Nitesh Pandey, Samee Ur Rehman, Martin Jacobus Johan Jak | 2019-06-04 |