Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12393095 | Hollow-core photonic crystal fiber based broadband radiation generator | Patrick Sebastian Uebel, Willem Richard Pongers | 2025-08-19 |
| 12306433 | Hollow-core photonic crystal fiber based optical component for broadband radiation generation | Patrick Sebastian Uebel, Peter Maximilian Götz, Sebastian Thomas Bauerschmidt, Coen Hubertus Matheus Baltis | 2025-05-20 |
| 12265229 | Method and apparatus for coherence scrambling in metrology applications | Zili Zhou | 2025-04-01 |
| 11846867 | Hollow-core photonic crystal fiber based broadband radiation generator | Patrick Sebastian Uebel, Willem Richard Pongers | 2023-12-19 |
| 11774671 | Hollow-core photonic crystal fiber based optical component for broadband radiation generation | Patrick Sebastian Uebel, Peter Maximilian Götz, Sebastian Thomas Bauerschmidt, Coen Hubertus Matheus Baltis | 2023-10-03 |
| 10908514 | Metrology apparatus, lithographic system, and method of measuring a structure | Duygu Akbulut, Nitesh Pandey, Jin LIAN | 2021-02-02 |
| 10599047 | Metrology apparatus, lithographic system, and method of measuring a structure | Nitesh Pandey, Zili Zhou, Armand Eugene Albert Koolen, Sebastianus Adrianus GOORDEN, Bastiaan Onne Fagginger Auer +1 more | 2020-03-24 |
| 10444640 | Metrology apparatus, lithographic system, and method of measuring a structure | Duygu Akbulut, Nitesh Pandey, Jin LIAN | 2019-10-15 |