Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326669 | Illumination apparatus and associated metrology and lithographic apparatuses | Simon Reinald HUISMAN, Arjan Johannes Anton Beukman, Arie Jeffrey Den Boef, Sebastianus Adrianus GOORDEN, Nitish Kumar +1 more | 2025-06-10 |
| 12265229 | Method and apparatus for coherence scrambling in metrology applications | Janneke Ravensbergen | 2025-04-01 |
| 12209994 | Method and metrology tool for determining information about a target structure, and cantilever probe | Mustafa Ümit ARABUL, Coen Adrianus Verschuren | 2025-01-28 |
| 11385553 | Metrology method, patterning device, apparatus and computer program | Nitesh Pandey, Olger Victor Zwier, Patrick Warnaar, Maurits Van Der Schaar, Elliott Gerard McNamara +6 more | 2022-07-12 |
| 11042100 | Measurement apparatus and method of measuring a target | Jin LIAN, Duygu Akbulut, Sergey Tarabrin | 2021-06-22 |
| 10996570 | Metrology method, patterning device, apparatus and computer program | Nitesh Pandey, Olger Victor Zwier, Patrick Warnaar, Maurits Van Der Schaar, Elliott Gerard McNamara +6 more | 2021-05-04 |
| 10983445 | Method and apparatus for measuring a parameter of interest using image plane detection techniques | Nitesh Pandey, Gerbrand Van Der Zouw, Arie Jeffrey Den Boef, Markus Gerardus Martinus Maria Van Kraaij, Armand Eugene Albert Koolen +7 more | 2021-04-20 |
| 10795269 | Method of determining a value of a parameter of interest, method of cleaning a signal containing information about a parameter of interest, device manufacturing method | Gerbrand Van Der Zouw, Nitesh Pandey, Markus Gerardus Martinus Maria Van Kraaij, Martinus Hubertus Maria Van Weert, Anagnostis Tsiatmas +2 more | 2020-10-06 |
| 10747124 | Method of measuring a target, metrology apparatus, polarizer assembly | Nitesh Pandey | 2020-08-18 |
| 10599047 | Metrology apparatus, lithographic system, and method of measuring a structure | Janneke Ravensbergen, Nitesh Pandey, Armand Eugene Albert Koolen, Sebastianus Adrianus GOORDEN, Bastiaan Onne Fagginger Auer +1 more | 2020-03-24 |
| 10423077 | Metrology method and apparatus, computer program and lithographic system | Nitesh Pandey, Armand Eugene Albert Koolen, Gerbrand Van Der Zouw | 2019-09-24 |
| 10353298 | Method of measuring a target, metrology apparatus, polarizer assembly | Nitesh Pandey | 2019-07-16 |
| 10191391 | Metrology method and apparatus, computer program and lithographic system | Nitesh Pandey, Armand Eugene Albert Koolen, Gerbrand Van Der Zouw | 2019-01-29 |