Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12013647 | Metrology method | Simon Gijsbert Josephus Mathijssen, Kaustuve Bhattacharyya, Arie Jeffrey Den Boef, Grzegorz Grzela, Timothy Dugan Davis +4 more | 2024-06-18 |
| 10908513 | Metrology method and apparatus and computer program | Simon Gijsbert Josephus Mathijssen, Kaustuve Bhattacharyya, Jinmoo Byun, Hyun-Su Kim, Won-Jae Jang +1 more | 2021-02-02 |
| 10705437 | Metrology method and apparatus, computer program and lithographic system | Narjes JAVAHERI, Mohammadreza Hajiahmadi, Murat Bozkurt, Alberto Da Costa Assafrao, Simon Gijsbert Josephus Mathijssen +1 more | 2020-07-07 |
| 10451978 | Metrology parameter determination and metrology recipe selection | Kaustuve Bhattacharyya, Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Mohammadreza Hajiahmadi, Farzad Farhadzadeh | 2019-10-22 |
| 10295913 | Inspection method and apparatus, and corresponding lithographic apparatus | Scott Anderson Middlebrooks, Rene A. M. Pluijms, Martyn John Coogans | 2019-05-21 |