Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11698346 | Methods and apparatus for monitoring a manufacturing process, inspection apparatus, lithographic system, device manufacturing method | Ioana Sorina Barbu, Murat Bozkurt, Maurits Van Der Schaar | 2023-07-11 |
| 11022892 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Patrick Warnaar, Simon Philip Spencer Hastings, Lukasz Jerzy Macht | 2021-06-01 |
| 11009345 | Metrology method, apparatus, and computer program to determine a representative sensitivity coefficient | Mohammadreza Hajiahmadi | 2021-05-18 |
| 10705437 | Metrology method and apparatus, computer program and lithographic system | Narjes JAVAHERI, Mohammadreza Hajiahmadi, Murat Bozkurt, Marc Johannes Noot, Simon Gijsbert Josephus Mathijssen +1 more | 2020-07-07 |
| 10551750 | Metrology method and apparatus and associated computer product | Adam Jan URBANCZYK, Hans Van Der Laan, Grzegorz Grzela, Chien-Hung Tseng, Jay Jianhui Chen | 2020-02-04 |
| 10466594 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Patrick Warnaar, Simon Philip Spencer Hastings, Lukasz Jerzy Macht | 2019-11-05 |
| 10310388 | Metrology method and apparatus and associated computer product | Adam Jan URBANCZYK, Hans Van Der Laan, Grzegorz Grzela, Chien-Hung Tseng, Jay Jianhui Chen | 2019-06-04 |