Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181828 | Method of determining a value of a parameter of interest of a patterning process, device manufacturing method | Patrick Warnaar, Hilko Dirk Bos, Hendrik Jan Hidde Smilde, Mohammadreza Hajiahmadi, Karel Hendrik Wouter VAN DEN BOS +2 more | 2021-11-23 |
| 11022892 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Patrick Warnaar, Simon Philip Spencer Hastings, Alberto Da Costa Assafrao | 2021-06-01 |
| 10481506 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Murat Bozkurt, Maurits Van Der Schaar, Patrick Warnaar, Martin Jacobus Johan Jak, Mohammadreza Hajiahmadi +1 more | 2019-11-19 |
| 10466594 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Patrick Warnaar, Simon Philip Spencer Hastings, Alberto Da Costa Assafrao | 2019-11-05 |
| 9696638 | Lithographic apparatus | Engelbertus Antonius Fransiscus Van Der Pasch, Joost Jeroen Ottens, Emiel Jozef Melanie Eussen, Johannes Henricus Wilhelmus Jacobs, William Peter Van Drent +2 more | 2017-07-04 |
| 9488465 | Level sensor, a method for determining a height map of a substrate using a selected resolution, and a lithographic apparatus | Laurent Khuat Duy, Martinus Cornelis Reijnen, Erik Johan Koop | 2016-11-08 |
| 9229340 | Lithographic apparatus | Engelbertus Antonius Fransiscus Van Der Pasch, Joost Jeroen Ottens, Emiel Jozef Melanie Eussen, Johannes Henricus Wilhelmus Jacobs, William Peter Van Drent +2 more | 2016-01-05 |
| 8842293 | Level sensor arrangement for lithographic apparatus and device manufacturing method | Arie Jeffrey Den Boef, Jozef Petrus Henricus Benschop, Ralph Brinkhof | 2014-09-23 |
| 8675210 | Level sensor, lithographic apparatus, and substrate surface positioning method | Arie Jeffrey Den Boef, Jozef Petrus Henricus Benschop, Ralph Brinkhof, Willem Jurrianus Venema, Laurent Khuat Duy +1 more | 2014-03-18 |
| 8570492 | Lithographic apparatus | Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Johannes Henricus Wilhelmus Jacobs, Joost Jeroen Ottens, Frank Staals +2 more | 2013-10-29 |
| 8488107 | Lithographic apparatus and device manufacturing method involving a level sensor having multiple projection units and detection units | Arie Jeffrey Den Boef, Frank Staals | 2013-07-16 |