Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9958788 | Method of operating a patterning device and lithographic apparatus | Vitaliy Prosyentsov, Kars Zeger Troost, Adrianus Martinus Van Der Wielen | 2018-05-01 |
| 9658541 | Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate | Marcus Adrianus Van De Kerkhof, Bearrach Moest, Vasco Miguel Matias Serrao, Cedran Bomhof | 2017-05-23 |
| 9568833 | Method of operating a patterning device and lithographic apparatus | Vitaliy Prosyentsov, Kars Zeger Troost, Adrianus Martinus Van Der Wielen | 2017-02-14 |
| 9417533 | Method of operating a patterning device and lithographic apparatus | Vitaliy Prosyentsov, Kars Zeger Troost, Adrianus Martinus Van Der Wielen | 2016-08-16 |
| 8773637 | Lithographic apparatus and device manufacturing method of applying a pattern to a substrate using sensor and alignment mark | Marcus Adrianus Van De Kerkhof, Bearrach Moest, Vasco Miguel Matias Serrao, Cedran Bomhof | 2014-07-08 |
| 8675210 | Level sensor, lithographic apparatus, and substrate surface positioning method | Arie Jeffrey Den Boef, Jozef Petrus Henricus Benschop, Ralph Brinkhof, Lukasz Jerzy Macht, Laurent Khuat Duy +1 more | 2014-03-18 |
| 8279396 | Lithographic apparatus and device manufacturing method | Nicolaas Ten Kate, Ronald Van Der Ham | 2012-10-02 |
| 7830493 | System and method for compensating for radiation induced thermal distortions in a substrate or projection system | Patricius Aloysius Jacobus Tinnemans, Koen Maria Zaal | 2010-11-09 |
| 7671319 | Lithographic apparatus, device manufacturing method and energy sensor | — | 2010-03-02 |
| 7595496 | Optimized correction of wafer thermal deformations in a lithographic process | Joost Jeroen Ottens, Harmen Klaas Van Der Schoot, Jeroen Pieter Starreveld, Wouterus Johannes Petrus Maria Maas, Boris Menchtchikov | 2009-09-29 |
| 7528933 | Lithographic apparatus and device manufacturing method utilizing a MEMS mirror with large deflection using a non-linear spring arrangement | — | 2009-05-05 |
| 7477772 | Lithographic apparatus and device manufacturing method utilizing 2D run length encoding for image data compression | Andrej Makarovic, Lambertus Gerardus Maria Kessels, Marcel Bontekoe | 2009-01-13 |
| 7460309 | Variable lens and exposure system | — | 2008-12-02 |
| 7391503 | System and method for compensating for thermal expansion of lithography apparatus or substrate | Johannes Jacobus Matheus Baselmans | 2008-06-24 |
| 7391676 | Ultrasonic distance sensors | Anastasius Jacobus Anicetus Bruinsma | 2008-06-24 |
| 7307694 | Lithographic apparatus, radiation beam inspection device, method of inspecting a beam of radiation and device manufacturing method | — | 2007-12-11 |
| 7250237 | Optimized correction of wafer thermal deformations in a lithographic process | Joost Jeroen Ottens, Harmen Klaas Van Der Schoot, Jeroen Pieter Starreveld, Wouterus Johannes Petrus Maria Maas, Boris Menchtchikov | 2007-07-31 |
| 7233384 | Lithographic apparatus and device manufacturing method, and device manufactured thereby for calibrating an imaging system with a sensor | Anastasius Jacobus Anicetus Bruinsma, Joeri Lof, Eduardus Johannes Gerardus Boon | 2007-06-19 |
| 7230677 | Lithographic apparatus and device manufacturing method utilizing hexagonal image grids | Johannes Jacobus Matheus Baselmans, Patricius Aloysius Jacobus Tinnemans | 2007-06-12 |
| 7221514 | Variable lens and exposure system | — | 2007-05-22 |
| 7209216 | Lithographic apparatus and device manufacturing method utilizing dynamic correction for magnification and position in maskless lithography | Pieter Willem Herman De Jager, Theodorus Leonardus Van Den Akker, Wouter Frans Willem Mulckhuyse, Lambertus Gerardus Maria Kessels | 2007-04-24 |
| 5199082 | Method of detecting an amplitude transient in a field of elements having a multivalent amplitude distribution, device suitable for performing the method, and video system including the device | — | 1993-03-30 |
| 4746789 | Reading device for bar codes | Antonius C. M. Gieles, Hendrikus Petrus Maria Sterken | 1988-05-24 |