Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9658541 | Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate | Marcus Adrianus Van De Kerkhof, Willem Jurrianus Venema, Bearrach Moest, Vasco Miguel Matias Serrao | 2017-05-23 |
| 8773637 | Lithographic apparatus and device manufacturing method of applying a pattern to a substrate using sensor and alignment mark | Marcus Adrianus Van De Kerkhof, Willem Jurrianus Venema, Bearrach Moest, Vasco Miguel Matias Serrao | 2014-07-08 |