Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11644755 | Lithographic method | Rowin MEIJERINK, Thijs Schenkelaars, Norbertus Josephus Martinus Van Den Nieuwelaar, Laurentius Johannes Adrianus Van Bokhoven | 2023-05-09 |
| 11599027 | Lithographic process and apparatus and inspection process and apparatus | Wim Tjibbo Tel, Hans Erik KATTOUW, Valerio ALTINI | 2023-03-07 |
| 11237490 | Lithographic apparatus and device manufacturing method | Lowell Lane Baker, James Robert DOWNES, Wijnand Hoitinga, Hermen Folken Pen | 2022-02-01 |
| 11199782 | Lithographic process and apparatus and inspection process and apparatus | Wim Tjibbo Tel, Hans Erik KATTOUW, Valerio ALTINI | 2021-12-14 |
| 10705438 | Lithographic method | Andre Bernardus Jeunink, Laurentius Johannes Adrianus Van Bokhoven, Stan Henricus Van Der Meulen, Yang-Shan Huang, Federico La Torre +4 more | 2020-07-07 |
| 10571814 | Lithographic method | Andre Bernardus Jeunink, Laurentius Johannes Adrianus Van Bokhoven, Stan Henricus Van Der Meulen, Yang-Shan Huang, Federico La Torre +4 more | 2020-02-25 |
| 9857694 | Estimating deformation of a patterning device and/or a change in its position | Peter A. Delmastro, Johannes Onvlee, Adrianus Martinus Van Der Wielen, Christopher Charles Ward | 2018-01-02 |
| 9658541 | Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate | Marcus Adrianus Van De Kerkhof, Willem Jurrianus Venema, Vasco Miguel Matias Serrao, Cedran Bomhof | 2017-05-23 |
| 9329500 | Lithographic apparatus configured to reconstruct an aerial pattern and to compare the reconstructed aerial pattern with an aerial pattern detected by an image sensor | Frank Staals, Joeri Lof, Erik Roelof Loopstra, Wim Tjibbo Tel | 2016-05-03 |
| 9116446 | Lithographic apparatus and method | Robbert Jan Voogd, Haico Victor Kok, Petrus Franciscus Van Gils | 2015-08-25 |
| 9036130 | Device and method for transmission image sensing | — | 2015-05-19 |
| 8975599 | Image sensor, lithographic apparatus comprising an image sensor and use of an image sensor in a lithographic apparatus | Frank Staals, Joeri Lof, Erik Roelof Loopstra, Wim Tjibbo Tel | 2015-03-10 |
| 8896817 | Lithographic projection apparatus, device manufacturing methods and mask with sensor and diffuser for use in a device manufacturing method | Marcus Adrianus Van De Kerkhof | 2014-11-25 |
| 8860928 | Lithographic apparatus, computer program product and device manufacturing method | Sytse Postma, Marcus Adrianus Van De Kerkhof, Vasco Miguel Matias Serrao | 2014-10-14 |
| 8773637 | Lithographic apparatus and device manufacturing method of applying a pattern to a substrate using sensor and alignment mark | Marcus Adrianus Van De Kerkhof, Willem Jurrianus Venema, Vasco Miguel Matias Serrao, Cedran Bomhof | 2014-07-08 |
| 8629418 | Lithographic apparatus and sensor therefor | Marcus Adrianus Van De Kerkhof, Haico Victor Kok, Borgert Kruizinga, Timotheus Franciscus Sengers, Marc Antonius Maria Haast +3 more | 2014-01-14 |
| 8436984 | Lithographic apparatus and method of irradiating at least two target portions | Cornelis Lambertus Maria Van Weert, Marcus Adrianus Van De Kerkhof | 2013-05-07 |
| 8426831 | Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector | Stoyan Nihtianov, Arie Johan Van Der Sijs, Petrus Wilhelmus Josephus Maria Kemper, Marc Antonius Maria Haast, Gerardus Wilhelmus Petrus Baas +6 more | 2013-04-23 |
| 8138485 | Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector | Stoyan Nihtianov, Arie Johan Van Der Sijs, Petrus Wilhelmus Josephus Maria Kemper, Marc Antonius Maria Haast, Gerardus Wilhelmus Petrus Baas +6 more | 2012-03-20 |
| 7675605 | Device and method for transmission image sensing | — | 2010-03-09 |
| 7655367 | Lithographic apparatus and device manufacturing method | Erik Petrus Buurman, Thomas Josephus Maria Castenmiller, Johannes Wilhelmus Maria Cornelis Teeuwsen, Marc Antonius Maria Haast | 2010-02-02 |
| 7586108 | Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector | Stoyan Nihtianov, Arie Johan Van Der Sijs, Petrus Wilhelmus Josephus Maria Kemper, Marc Antonius Maria Haast, Gerardus Wilhelmus Petrus Baas +6 more | 2009-09-08 |
| 7583359 | Reduction of fit error due to non-uniform sample distribution | — | 2009-09-01 |
| 7525638 | Lithographic apparatus and device manufacturing method | Erik Petrus Buurman, Thomas Josephus Maria Castenmiller, Johannes Wilhelmus Maria Cornelis Teeuwsen, Mare Antonius Maria Haast | 2009-04-28 |
| 7453078 | Sensor for use in a lithographic apparatus | Haico Victor Kok, Marcus Adrianus Van De Kerhof, Borgert Kruizinga, Timotheus Franciscus Sengers, Marc Antonius Maria Haast +3 more | 2008-11-18 |