Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11599027 | Lithographic process and apparatus and inspection process and apparatus | Wim Tjibbo Tel, Valerio ALTINI, Bearrach Moest | 2023-03-07 |
| 11199782 | Lithographic process and apparatus and inspection process and apparatus | Wim Tjibbo Tel, Valerio ALTINI, Bearrach Moest | 2021-12-14 |
| 7502096 | Lithographic apparatus, calibration method, device manufacturing method and computer program product | Jeffrey Godefridus Cornelis Tempelaars, Gerardus Carolus Johannus Hofmans, Rene Oesterholt, Jan-Peter Hauschild | 2009-03-10 |